Phase Transformations in Gallium Oxide Layers

IF 0.8 4区 物理与天体物理 Q4 PHYSICS, APPLIED Technical Physics Letters Pub Date : 2024-03-14 DOI:10.1134/s1063785023900856
A. V. Osipov, Sh. Sh. Sharofidinov, A. V. Kremleva, E. V. Osipova, A. M. Smirnov, S. A. Kukushkin
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Abstract

The three main crystalline modifications of Ga2O3, namely α-phase, ε-phase, and β-phase were grown on sapphire substrates using the hydride vapour phase epitaxy (HVPE) method. The temperatures of the substrates and the values of the precursor fluxes required to obtain each phase exclusively were determined. It was observed that the metastable ε-phase easily transforms into a stable β-phase during annealing. However, the metastable α-phase undergoes an intermediate amorphous phase during annealing, leading to flaking and collapse. This behavior arises from the excessively large increase in density (~10%) during the transformation from α-phase to β-phase, which results in significant elastic stresses and an increase in the height of the phase transition barrier.

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氧化镓层中的相变
摘要 利用氢化物气相外延(HVPE)方法在蓝宝石衬底上生长了 Ga2O3 的三种主要晶型,即 α 相、ε 相和 β 相。确定了基底的温度和获得每种相所需的前驱体通量值。结果表明,在退火过程中,易陨的ε相很容易转变为稳定的β相。然而,可蜕变的 α 相在退火过程中会出现中间非晶相,导致剥落和坍塌。这种行为是由于在从α相转变为β相的过程中,密度增加过多(约 10%),从而产生了巨大的弹性应力,并增加了相变障壁的高度。
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来源期刊
Technical Physics Letters
Technical Physics Letters 物理-物理:应用
CiteScore
1.50
自引率
0.00%
发文量
44
审稿时长
2-4 weeks
期刊介绍: Technical Physics Letters is a companion journal to Technical Physics and offers rapid publication of developments in theoretical and experimental physics with potential technological applications. Recent emphasis has included many papers on gas lasers and on lasing in semiconductors, as well as many reports on high Tc superconductivity. The excellent coverage of plasma physics seen in the parent journal, Technical Physics, is also present here with quick communication of developments in theoretical and experimental work in all fields with probable technical applications. Topics covered are basic and applied physics; plasma physics; solid state physics; physical electronics; accelerators; microwave electron devices; holography.
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