Wenyong Zhao, Hong Zhou, Jiahao Li, Yuchen Lu, Yuqiang Ding
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引用次数: 0
Abstract
In this paper, three complexes La2(thd)6 (thd = 2,2,6,6-tetramethyl-3,5-heptanedione, 1), La2(tmod)6 (tmod = 2,2,6,6-tetramethyl octane-3, 5-dionates, 2) and La2(ibpm)6 (ibpm = 2,2,6-trimethyl-3, 5-heptane-dionates, 3) were synthesized by one-step method and characterized with 1H-NMR, 13C-NMR and X-ray single-crystal diffraction. The melting point and TGA data demonstrated that the asymmetry of the ligand and the number of flexible joints could improve the volatility of the complex. With the help of asymmetry and flexible joint, La2(tmod)6 was selected as ALD precursor to deposit La2O3 film on SiO2/Si (100) wafer. The self-limited deposition results demonstrated that La2(tmod)6 is better precursor than reported La2(thd)6 and La(thd)3-DMEA (DMEA = N,N-dimethylethylenediamine).
期刊介绍：
Transition Metal Chemistry is an international journal designed to deal with all aspects of the subject embodied in the title: the preparation of transition metal-based molecular compounds of all kinds (including complexes of the Group 12 elements), their structural, physical, kinetic, catalytic and biological properties, their use in chemical synthesis as well as their application in the widest context, their role in naturally occurring systems etc.
Manuscripts submitted to the journal should be of broad appeal to the readership and for this reason, papers which are confined to more specialised studies such as the measurement of solution phase equilibria or thermal decomposition studies, or papers which include extensive material on f-block elements, or papers dealing with non-molecular materials, will not normally be considered for publication. Work describing new ligands or coordination geometries must provide sufficient evidence for the confident assignment of structural formulae; this will usually take the form of one or more X-ray crystal structures.
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