Oliver Durnan, Vikrant Kumar, Reem Alshanbari, Megan Noga, Ioannis Kymissis
{"title":"An active-matrix microLED display based on monolithic integration with IGZO backplane","authors":"Oliver Durnan, Vikrant Kumar, Reem Alshanbari, Megan Noga, Ioannis Kymissis","doi":"10.1002/jsid.1299","DOIUrl":null,"url":null,"abstract":"<p>This paper presents a method of monolithically integrating gallium nitride micrometer-scale light-emitting diodes (microLEDs) with an indium gallium zinc oxide (IGZO) thin-film transistor (TFT) backplane to produce an active-matrix microdisplay. After discussion of the fabrication process, individual LEDs, TFTs, and the integrated system are characterized. Results demonstrate a 32 × 32 pixel, 78.4 PPI microdisplay with luminance exceeding 1500 nits. The dynamic set and hold behaviors of the active-matrix pixel circuit are analyzed to verify the applicability of this technology for use in high and low refresh rate displays.</p>","PeriodicalId":49979,"journal":{"name":"Journal of the Society for Information Display","volume":"32 5","pages":"350-359"},"PeriodicalIF":1.7000,"publicationDate":"2024-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Society for Information Display","FirstCategoryId":"5","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/jsid.1299","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents a method of monolithically integrating gallium nitride micrometer-scale light-emitting diodes (microLEDs) with an indium gallium zinc oxide (IGZO) thin-film transistor (TFT) backplane to produce an active-matrix microdisplay. After discussion of the fabrication process, individual LEDs, TFTs, and the integrated system are characterized. Results demonstrate a 32 × 32 pixel, 78.4 PPI microdisplay with luminance exceeding 1500 nits. The dynamic set and hold behaviors of the active-matrix pixel circuit are analyzed to verify the applicability of this technology for use in high and low refresh rate displays.
期刊介绍:
The Journal of the Society for Information Display publishes original works dealing with the theory and practice of information display. Coverage includes materials, devices and systems; the underlying chemistry, physics, physiology and psychology; measurement techniques, manufacturing technologies; and all aspects of the interaction between equipment and its users. Review articles are also published in all of these areas. Occasional special issues or sections consist of collections of papers on specific topical areas or collections of full length papers based in part on oral or poster presentations given at SID sponsored conferences.