Electric field and higher harmonics of RF plasma slit jet measured by antennas and VI probes

K. Polášková, Petr Drexler, Miloš Klíma, Jan Macháč, D. Nečas, M. Svanda, Lenka Zajíčková
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Abstract

The cold atmospheric plasma jets change their character when interacting with the different surfaces. Since such interaction is the primary area of plasma jet applications, it is essential to monitor the process. The non-linearity of the RF plasma slit jet (PSJ) was analyzed using the VI probes and a novel method, the non- intrusive antenna measurements. Regardless of the experimental setup and gas mixture (Ar, Ar/O2 , Ar/N2), the PSJ frequency spectrum consisted of the following main features: dominant fundamental frequency peak, relatively strong odd harmonics, and significantly weaker even harmonics. The lowest degree of non-linearity was recorded for the Ar PSJ ignited against a grounded target. Admixing a molecular gas increased the discharge non-linearity as observed by even harmonics intensities. It was attributed to the enhancement of secondary electron emission from the dielectric surfaces. In addition to the non-linearity analysis, the antenna spectra were for the first time used to determine the semi-quantative values of the PSJ-radiated electric field. The electric fields decreased by a factor of 2 after the admixing of nitrogen and oxygen molecular gases. Out of the studied targets, the highest electric fields were observed when plasma impinged on the grounded targets, followed by the floating target (2x lower) and the PSJ ignited in the open space configuration (4x lower than in the grounded target configuration).
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通过天线和 VI 探头测量射频等离子狭缝射流的电场和高次谐波
冷大气等离子体射流在与不同表面相互作用时会改变其特性。由于这种相互作用是等离子体射流应用的主要领域,因此必须对这一过程进行监测。我们使用 VI 探头和一种新方法(非侵入式天线测量)分析了射频等离子狭缝射流(PSJ)的非线性。无论实验装置和混合气体(氩气、氩气/氧气、氩气/二氧化氮)如何,PSJ 的频谱都具有以下主要特征:基频峰占主导地位,奇次谐波相对较强,偶次谐波明显较弱。对接地靶点燃的氩 PSJ 记录到的非线性程度最低。通过偶次谐波强度观察到,掺入分子气体增加了放电非线性。这是因为电介质表面的二次电子发射增强了。除了非线性分析,天线光谱还首次用于确定 PSJ 辐射电场的半定量值。在掺入氮和氧分子气体后,电场降低了 2 倍。在所研究的目标中,等离子体撞击接地目标时观察到的电场最高,其次是浮动目标(低 2 倍)和在开放空间配置中点燃的 PSJ(比接地目标配置低 4 倍)。
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