Kazuki Komiya, Yoshikazu Teranishi, Hidehiko Yamaoka, Shuichi Date, Ming Yang
{"title":"Prototyping of microelectrode devices applied by transfer printing","authors":"Kazuki Komiya, Yoshikazu Teranishi, Hidehiko Yamaoka, Shuichi Date, Ming Yang","doi":"10.35848/1347-4065/ad4656","DOIUrl":null,"url":null,"abstract":"\n In this study, ion implantation was adopted to treat surface of the mold for improving detachability in the nanoimprinting. A nanoimprinting was performed successfully for fabrication a micro-electrode pattern with a smallest dimension of 100 nm by using the treated mold with proper condition. It is found that both of the wettability and roughness of the mold surface affect the detachability and it is important to decrease the wettability and keep the surface roughness lower. An optimal dose volume exists for the detachability","PeriodicalId":505044,"journal":{"name":"Japanese Journal of Applied Physics","volume":"41 5","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-05-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Japanese Journal of Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.35848/1347-4065/ad4656","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
In this study, ion implantation was adopted to treat surface of the mold for improving detachability in the nanoimprinting. A nanoimprinting was performed successfully for fabrication a micro-electrode pattern with a smallest dimension of 100 nm by using the treated mold with proper condition. It is found that both of the wettability and roughness of the mold surface affect the detachability and it is important to decrease the wettability and keep the surface roughness lower. An optimal dose volume exists for the detachability
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