{"title":"Dielectric Thin Films for Future Electron Devices: Science and Technology 2023","authors":"","doi":"10.35848/1347-4065/ad43f4","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":505044,"journal":{"name":"Japanese Journal of Applied Physics","volume":"18 5","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Japanese Journal of Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.35848/1347-4065/ad43f4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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