Multimodal electrohydrodynamic jet printing-based microstructure-sensitized flexible pressure sensor

Abstract

Surface modification with micro/nanostructures is a common approach for enhancing the performance of flexible pressure sensors. However, the current fabrication of the singular functionality of instruments and redundancy of processes increase the complexity of the sensor manufacturing process. In this study, we developed a multilayer microstructure-enhanced flexible capacitive pressure sensor based on the multimodal electrohydrodynamic jet (E-jet) printing technology. The experimental results demonstrate that the sensors incorporating the microstructure-sensitized electrode layer and the polyvinyl alcohol/graphene/polydimethylsiloxane dielectric layer exhibit the following characteristics: high sensitivity (0.3139 kPa⁻¹/0–2 kPa), low limit of detection (∼100 mg), and stable performance even after 10,000 cycles. Moreover, microstructure-enhanced sensors have considerable potential for human behavior detection, such as detecting fluid flow, tracking muscle movements, and measuring pulse rates. Finally, microstructure-enhanced sensors fabricated using the E-jet printing method present a novel approach for designing sensitized structures in capacitive pressure sensors.