{"title":"Weakly guiding approximation of three-dimensional waveguide model for extreme ultraviolet lithography simulation","authors":"Hiroyoshi Tanabe, Akira Jinguji, Atsushi Takahashi","doi":"10.1364/josaa.516610","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":510244,"journal":{"name":"Journal of the Optical Society of America A","volume":"23 3","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Optical Society of America A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/josaa.516610","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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