Design of mask for depositing continuously variable filter

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY Accounts of Chemical Research Pub Date : 2024-06-01 DOI:10.1117/1.jnp.18.026008

Xiaodan Gao, Chun Wei

引用次数: 0

Abstract

This work proposes a mask design method to change the film thickness distribution for the rotary plane coating machine, and successfully deposits a continuously variable filter. The results indicate that the test spectrum exhibits linear gradient passband filtering characteristics at different positions along the spatial direction. The continuously variable filter operates between 650 and 1050 nm, with the linear dispersion coefficient of 32.92 nm/mm over 12 mm. The peak transmittance of the filter is more than 80%, the transmittance of cutoff band is less than 0.1%, and the half bandwidth of the passband is almost consistent with 1.5% of the central wavelength. These parameter indicators fully meet the design requirements.

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设计用于沉积连续可变滤波器的掩膜

本研究提出了一种改变旋转平面镀膜机膜厚分布的掩膜设计方法，并成功地沉积了一个连续可变滤波器。结果表明，测试光谱在沿空间方向的不同位置呈现出线性梯度通带滤波特性。连续可变滤波器的工作波长为 650 至 1050 nm，在 12 mm 范围内的线性色散系数为 32.92 nm/mm。滤波器的峰值透过率大于 80%，截止带的透过率小于 0.1%，通带的半带宽与中心波长的 1.5% 基本一致。这些参数指标完全符合设计要求。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.