Exact surface measurement based on phase error insensitive method for white-light scanning interferometer

Abstract

Phase error induced by the scanning error of piezoelectric transducer and vibration in white-light interference signal (WLIS) impose limitations on measurement accuracy. In this paper, two techniques are investigated to eliminate phase error cooperatively. A monochromatic interferometer owning the same optical path as the white-light scanning interferometer (WLSI) is employed to detect and compensate the phase error. Due to the incomplete consistency between the detected phase error and its actual distribution, an algorithm is introduced to further enhance the measurement accuracy. The simulation is given to prove the proposed method is available in different magnitude of noise. In the experiment, the front surface of wedged window is measured, whose maximum fluctuations are reduced to 28.8 nm and 3.0 nm from 62.7 nm with the gradual application of two technologies, and the repeatability reach 5.0 nm and 0.4 nm from 16.8 nm, respectively. The root mean square height S _q and maximum height S _z ultimately decrease to 1.3 nm and 1.6 nm. The measurement of step with height of about 3.0 μm also has the good accuracy and repeatability after phase error elimination. Since the different reflectivity of measured surfaces in the wavelength range of light source will also bring the measurement error, its influences are analyzed by simulation. The proposed techniques provide a phase error insensitive method for WLSI that has potential on measurement in the complex environment.