Design Method of 50kV/0–40kHz High Voltage AC Power Supply for Dielectric Barrier Discharge (DBD) Based on SG3525A

Abstract

The generation of plasma by DBD has the advantages of low environmental requirements, simple operation, wide industrial applications, and the ability to stably generate low-temperature plasma. The high-frequency and high-voltage AC power supply is the main component of the DBD device. To achieve an adjustable frequency of the output voltage of high-frequency and high-voltage power supplies and improve the voltage stability performance of the power supply, this paper proposes a design scheme of a high-voltage and high-frequency AC power supply for DBD based on SG3525A, which introduces the system composition, control strategy, hardware circuit, simulation, and experimental results of the driving power supply in detail. The driving power supply adjusts the output voltage through a PWM signal generation circuit, an RCD absorption buffer circuit, and a power factor correction DC power supply. Under a DBD load with an equivalent capacitance of 48pF, the peak output voltage of the driving power supply is 50 kV, and the output frequency is up to 40 kHz. The experimental results show that the driving power supply meets the driving requirements of high voltage, high frequency, and excellent voltage stabilization performance for DBD.