A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams

IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Microelectromechanical Systems Pub Date : 2024-06-24 DOI:10.1109/JMEMS.2024.3405456
Jian Zhao;Heng Zhong;Rongjian Sun;Najib Kacem;Ming Lyu;Zeyuan Dong;Pengbo Liu
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Abstract

The snap through phenomenon of curved beam structures offers the possibility for designing high-performance filters, however, superharmonic resonances outside the filter’s passband are difficult to be attenuated. Therefore, a two-stage bandpass filter incorporating two electromagnetically coupled curved microbeams is designed, which possesses excellent specifications of sharp switching in the stopband and flat bandwidth compared to single curved-beam based filter. The reduced-order model considering the nonlinear electromagnetic forces and geometric nonlinearities is established, and discretized using the Galerkin method. Then, the resulting static and dynamic reduced order models are numerically solved. Extensive numerical simulation results show that the improved filter has a rectangular coefficient close to 1.0, a passband ripple of 0.2 dB, and a bandwidth ratio of 14.8%, which drastically reduces the stopband interference to 10% of the passband signal. Finally, the effects of DC voltage, AC voltage and coupling strength on the center frequency and bandwidth are parametrically investigated, where the center frequency can be tuned between 23.81 kHz and 25.16 kHz and the bandwidth covers the frequency range from 22.46 kHz to 26.05 kHz. [2024-0054]
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包含两个电磁耦合曲面光束的可调两级带通滤波器
弧形微束结构的快穿现象为设计高性能滤波器提供了可能,但滤波器通带之外的超谐波共振却难以衰减。因此,我们设计了一种包含两个电磁耦合曲面微梁的两级带通滤波器,与基于单个曲面微梁的滤波器相比,该滤波器具有止带尖锐切换和平坦带宽的优异特性。建立了考虑非线性电磁力和几何非线性的降阶模型,并使用 Galerkin 方法对其进行离散化。然后,对得到的静态和动态降阶模型进行数值求解。大量数值模拟结果表明,改进后的滤波器矩形系数接近 1.0,通带纹波为 0.2 dB,带宽比为 14.8%,从而将阻带干扰大幅降低到通带信号的 10%。最后,研究了直流电压、交流电压和耦合强度对中心频率和带宽的参数影响,其中中心频率可在 23.81 kHz 至 25.16 kHz 之间调整,带宽覆盖 22.46 kHz 至 26.05 kHz 的频率范围。[2024-0054]
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来源期刊
Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems 工程技术-工程:电子与电气
CiteScore
6.20
自引率
7.40%
发文量
115
审稿时长
7.5 months
期刊介绍: The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.
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