An experimental and computational investigation of discharge mode transitions in a partially magnetized radio frequency capacitively coupled oxygen discharge

Abstract

A magnetized capacitively coupled oxygen plasma was studied synergistically using phase resolved optical emission spectroscopy and particle‐based kinetic simulation. Discharge mode transitions from ambipolar mode into drift mode and finally into α mode induced by increasing the magnetic field were observed at different driving frequencies and different electrode gaps. The simulation results demonstrate that the discharge operating in the same mode exhibits a similar degree of electronegativity. By increasing driving frequency or electrode gap, the same discharge mode transition tends to occur at a lower magnetic field, and, meanwhile, the high electric field and electron power absorption shift from the bulk region to the sheath edge.