Large-scale growth of MoS2 hybrid layer by chemical vapor deposition with nanosheet promoter

Abstract

Molybdenum disulfide (MoS₂) serves as the representative transition metal dichalcogenide material, showing promise for diverse applications owing to its outstanding properties. Extensive research has been conducted on the growth of large-scale MoS₂ films using chemical vapor deposition (CVD) with seeding accelerators for various device applications. In this study, we investigated the growth of large-scale MoS₂ films for potential applications, in which our approach utilized CVD with a homogeneous nanosheet promoter (MoS₂ flakes) and effectively minimized residue creation. Optical and structural analyses confirmed the successful synthesis of a large-scale MoS₂ layer. Moreover, the decoration of metallic nanoparticles on the MoS₂ surface was employed to enhance the functionalities of application devices such as optical sensors and gas sensors. The capability of MoS₂ to act as a nucleation site for nanoparticles during synthesis offered an intriguing pathway for augmenting the attachment and performance of nanoparticles on the MoS₂ surface. The photodetector, integrating a hybrid MoS₂ layer and Cu nanoparticles, exhibited superior photodetection properties, attributed to the increased excitons at the interface between the metal electrodes and MoS₂ films. Furthermore, in order to enhance the characteristics of the gas sensor, Pd nanoparticles were incorporated during the synthesis of MoS₂ layers. This dynamic interface between Pd particles and MoS₂ films presents an opportunity to explore novel materials with enhanced catalytic properties.