Single-cavity loss-enabled nanometrology

IF 38.1 1区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Nature nanotechnology Pub Date : 2024-07-17 DOI:10.1038/s41565-024-01729-8
Jipeng Xu, Yuanhao Mao, Zhipeng Li, Yunlan Zuo, Jianfa Zhang, Biao Yang, Wei Xu, Ning Liu, Zhi Jiao Deng, Wei Chen, Keyu Xia, Cheng-Wei Qiu, Zhihong Zhu, Hui Jing, Ken Liu
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Abstract

Optical monitoring of the position and alignment of objects with a precision of only a few nanometres is key in applications such as smart manufacturing and force sensing. Traditional optical nanometrology requires precise nanostructure fabrication, multibeam interference or complex postprocessing algorithms, sometimes hampering wider adoption of this technology. Here we show a simplified, yet robust, approach to achieve nanometric metrology down to 2 nm resolution that eliminates the need for any reference signal for interferometric measurements. We insert an erbium-doped quartz crystal absorber into a single Fabry–Pérot cavity with a length of 3 cm and then induce exceptional points by matching the optical loss with the intercavity coupling. We experimentally achieve a displacement response enhancement of 86 times compared with lossless methods, and theoretically argue that an enhancement of over 450 times, corresponding to subnanometre resolution, may be achievable. We also show a fivefold enhancement in the signal-to-noise ratio, thus demonstrating that non-Hermitian sensors can lead to improved performances over the Hermitian counterpart.

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单腔损耗纳米计量学
在智能制造和力传感等应用中,对精度仅为几纳米的物体位置和排列进行光学监测至关重要。传统的光学纳米计量学需要精确的纳米结构制造、多波束干扰或复杂的后处理算法,有时会阻碍该技术的广泛应用。在这里,我们展示了一种简化而稳健的方法,可实现分辨率低至 2 纳米的纳米计量,无需任何参考信号即可进行干涉测量。我们将掺铒石英晶体吸收器插入长度为 3 厘米的单个法布里-佩罗腔,然后通过匹配腔间耦合的光学损耗来诱导异常点。与无损耗方法相比,我们在实验中实现了 86 倍的位移响应增强,并从理论上证明可以实现 450 倍以上的增强,相当于亚纳米分辨率。我们还展示了五倍的信噪比增强,从而证明非赫米提传感器比赫米提传感器性能更佳。
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来源期刊
Nature nanotechnology
Nature nanotechnology 工程技术-材料科学:综合
CiteScore
59.70
自引率
0.80%
发文量
196
审稿时长
4-8 weeks
期刊介绍: Nature Nanotechnology is a prestigious journal that publishes high-quality papers in various areas of nanoscience and nanotechnology. The journal focuses on the design, characterization, and production of structures, devices, and systems that manipulate and control materials at atomic, molecular, and macromolecular scales. It encompasses both bottom-up and top-down approaches, as well as their combinations. Furthermore, Nature Nanotechnology fosters the exchange of ideas among researchers from diverse disciplines such as chemistry, physics, material science, biomedical research, engineering, and more. It promotes collaboration at the forefront of this multidisciplinary field. The journal covers a wide range of topics, from fundamental research in physics, chemistry, and biology, including computational work and simulations, to the development of innovative devices and technologies for various industrial sectors such as information technology, medicine, manufacturing, high-performance materials, energy, and environmental technologies. It includes coverage of organic, inorganic, and hybrid materials.
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