Single-cavity loss-enabled nanometrology

Abstract

Optical monitoring of the position and alignment of objects with a precision of only a few nanometres is key in applications such as smart manufacturing and force sensing. Traditional optical nanometrology requires precise nanostructure fabrication, multibeam interference or complex postprocessing algorithms, sometimes hampering wider adoption of this technology. Here we show a simplified, yet robust, approach to achieve nanometric metrology down to 2 nm resolution that eliminates the need for any reference signal for interferometric measurements. We insert an erbium-doped quartz crystal absorber into a single Fabry–Pérot cavity with a length of 3 cm and then induce exceptional points by matching the optical loss with the intercavity coupling. We experimentally achieve a displacement response enhancement of 86 times compared with lossless methods, and theoretically argue that an enhancement of over 450 times, corresponding to subnanometre resolution, may be achievable. We also show a fivefold enhancement in the signal-to-noise ratio, thus demonstrating that non-Hermitian sensors can lead to improved performances over the Hermitian counterpart. A 2 nm displacement resolution of a centimetre-sized object in a 3 cm cavity is demonstrated.