Yingbo Feng , Hengfeng Yang , Hong Shen , Jing Zhou
{"title":"Selective removal of variable thickness multilayer materials based on photoelectric detection","authors":"Yingbo Feng , Hengfeng Yang , Hong Shen , Jing Zhou","doi":"10.1016/j.precisioneng.2024.07.008","DOIUrl":null,"url":null,"abstract":"<div><p>An ultrafast laser processing system with near-axis monochromatic photoelectric detection for selective removal of variable thickness multilayer materials is proposed. The correlation between signal evolution and ablation progress of silver layer with the variable thickness is established, and a signal attenuation threshold is determined to ensure non-removal of the substrate, providing criteria for the processing strategy combining high and low energies. The proposed strategy is experimentally validated, which balances the quality of low-energy removal and the efficiency of high-energy removal.</p></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"89 ","pages":"Pages 430-437"},"PeriodicalIF":3.5000,"publicationDate":"2024-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0141635924001600","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
引用次数: 0
Abstract
An ultrafast laser processing system with near-axis monochromatic photoelectric detection for selective removal of variable thickness multilayer materials is proposed. The correlation between signal evolution and ablation progress of silver layer with the variable thickness is established, and a signal attenuation threshold is determined to ensure non-removal of the substrate, providing criteria for the processing strategy combining high and low energies. The proposed strategy is experimentally validated, which balances the quality of low-energy removal and the efficiency of high-energy removal.
期刊介绍：
Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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