Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

Adaptive neural network fixed-time control of piezoelectric actuator for precision motion tracking 压电驱动器精确运动跟踪的自适应神经网络定时控制

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-15 DOI: 10.1016/j.precisioneng.2026.01.015

Yunzhi Zhang , Zhao Feng , Jie Ling , Chenyang Ding

Piezoelectric actuators (PEAs) are critical in precision motion applications due to their high precision and fast response. Existing control methods for PEAs rely heavily on the accurate model integrated in the controllers to realize the precision motion tracking. However, complicated dynamics and inherent hysteresis nonlinearity bring challenges in modeling and identification. The accompanying model uncertainties bring difficulties for the rapid convergence of the tracking error and precision motion tracking of PEAs in the application. To overcome these limitations, this paper proposes an adaptive neural network fixed-time control (ANNFTC) scheme. The ANNFTC integrates the backstepping method and online neural network compensation, both designed according to the practical fixed-time stability. Unlike the fixed-time control (FTC) and related works, ANNFTC requires no prior knowledge of hysteresis while ensuring robustness to external disturbance and model uncertainties, including unmodeled dynamics and hysteresis nonlinearity. Rigorous proof of practical fixed-time convergence for the tracking error is provided, along with comprehensive experimental validation conducted on a PEA. The experimental campaign encompasses reference tracking across frequencies ranging from 1 to 10 Hz and peak-to-peak amplitudes from 1 to 9

μ

m, as well as hybrid-frequency sinusoidal tracking in the presence of input disturbances. Experimental results show that compared to other tested FTCs, ANNFTC achieves better tracking accuracy and more rapid convergence time of tracking error under different initial states, the existence of model uncertainties, and the external disturbance.

压电驱动器因其高精度和快速响应而在精密运动应用中发挥着至关重要的作用。现有的机器人控制方法严重依赖于控制器中集成的精确模型来实现精确的运动跟踪。然而，复杂的动力学和固有的滞后非线性给建模和识别带来了挑战。伴随的模型不确定性给应用中跟踪误差的快速收敛和精确运动跟踪带来了困难。为了克服这些限制，本文提出了一种自适应神经网络固定时间控制（ANNFTC）方案。该方法结合了逆推法和在线神经网络补偿，两者都是根据实际定时稳定性设计的。与固定时间控制（FTC）及相关工作不同，ANNFTC不需要预先了解迟滞，同时确保对外部干扰和模型不确定性（包括未建模的动力学和迟滞非线性）的鲁棒性。给出了跟踪误差实际固定时间收敛性的严格证明，并在PEA上进行了全面的实验验证。实验活动包括参考跟踪，频率范围从1到10 Hz，峰值幅度从1到9 μm，以及存在输入干扰的混合频率正弦跟踪。实验结果表明，在不同初始状态、存在模型不确定性和外部干扰的情况下，ANNFTC与其他已测试的ftc相比，具有更好的跟踪精度和更快的跟踪误差收敛时间。

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引用次数: 0

A novel exploration of low damage elliptical ultrasonic vibration assisted cutting method for high-power fiber laser beam shapers 高功率光纤激光束成形器低损伤椭圆超声振动辅助切割方法的新探索

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-13 DOI: 10.1016/j.precisioneng.2026.01.013

Ganyu Chen , Yupeng Xiong , Cheng Huang , Yang Ou , Jiafu Zhou , Yifan Dai

High-power fiber lasers are crucial for defense and industrial applications owing to their superior energy-conversion efficiency and beam quality. However, a fiber laser usually exhibits a Gaussian distribution of the optical intensity mode. This decreases the beam energy utilization efficiency and increases the laser damage probability for the optics in high-power laser systems. Therefore, this study presents the design and fabrication of a novel integrated dual-aspheric beam shaper for transforming the Gaussian beam of high-power fiber lasers into a collimated flat-top profile while preserving the phase distribution with a high fill factor. Addressing the manufacturing challenges of the small-aperture, steeply curved of the shaper and the hard-to-machine characteristics of fused silica, this research employs elliptical ultrasonic vibration cutting (EUVC) technology as a low-damage processing method for fused silica beam shapers manufacturing. Kinematic analysis confirms that the periodic tool-workpiece separation in EUVC reduces cutting forces. Subsurface damage (SSD) detection experiments demonstrate a 60 % reduction in SSD compared to conventional ultraprecision cutting. Analysis indicates that discontinuous tool-workpiece contact suppresses micro-crack propagation. Laser shaping experiments validate that the EUVC fabricated shaper achieved controlling the intensity distribution of the fiber laser into flat profiles and realized a far-field energy concentration of 50.19 %, a near-field uniformity of 83.44 % and a laser-induced damage threshold (LIDT) of 10 kW/cm², confirming its significant potential for high-power fiber laser shaping.

高功率光纤激光器由于其优越的能量转换效率和光束质量，在国防和工业应用中至关重要。然而，光纤激光器的光强模式通常呈高斯分布。这降低了光束能量的利用效率，增加了高功率激光系统中光学器件的激光损伤概率。因此，本研究提出了一种新型集成双非球面光束整形器的设计和制造，用于将高功率光纤激光器的高斯光束转换成准直平顶轮廓，同时保持高填充系数的相位分布。针对熔融二氧化硅成形器孔径小、弯曲度大、加工难度大的特点，采用椭圆超声振动切割（EUVC）技术制造熔融二氧化硅光束成形器，实现了低损伤加工。运动学分析证实了EUVC中刀具与工件的周期性分离减小了切削力。亚表面损伤（SSD）检测实验表明，与传统的超精密切割相比，SSD减少了60%。分析表明，刀具与工件的不连续接触抑制了微裂纹的扩展。激光整形实验验证了EUVC制造的整形器实现了将光纤激光器的强度分布控制为平坦型，远场能量浓度达到50.19%，近场均匀性达到83.44%，激光诱导损伤阈值（LIDT）达到10 kW/cm2，证明了其在高功率光纤激光整形领域的巨大潜力。

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引用次数: 0

Advances on the mechanical robustness of superhydrophobic surfaces: Strategies, fabrication, and test 超疏水表面机械稳健性的研究进展：策略、制造和测试

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-10 DOI: 10.1016/j.precisioneng.2026.01.006

Douwei Liu, Wenbin Zhong, Wenhan Zeng, Xiangqian Jiang

Since the discovery of the self-cleaning property of lotus leaves, superhydrophobic surfaces have attracted significant attention due to their great potential in various engineering applications, including self-cleaning, enhanced heat transfer, antifouling, antibacterial, anti-icing, and droplet manipulation. However, their structural fragility continues to limit practical implementation. In recent years, remarkable progress has been made in developing mechanically robust superhydrophobic surfaces, covering aspects such as wetting theory, structured surface design, and advanced fabrication techniques. Nevertheless, a systematic review of these recent achievements is still lacking, which is crucial for providing new insights and guiding future research. Therefore, this paper comprehensively reviews recent advances in four key areas—wetting theory, robust superhydrophobic surface design strategies, advanced fabrication techniques, and testing methodologies—aiming to identify potential future research directions and offer new perspectives for the development of superhydrophobic surfaces.

自发现荷叶的自清洁特性以来，超疏水表面因其在自清洁、强化传热、防污、抗菌、防冰、液滴操纵等各种工程应用方面的巨大潜力而备受关注。然而，它们的结构脆弱性继续限制着实际实施。近年来，在开发机械坚固的超疏水表面方面取得了显著进展，包括润湿理论、结构表面设计和先进的制造技术。然而，对这些最新成果的系统回顾仍然缺乏，这对于提供新的见解和指导未来的研究至关重要。因此，本文从润湿理论、稳健的超疏水表面设计策略、先进的制备技术和测试方法四个关键领域综述了近年来的研究进展，旨在确定潜在的未来研究方向，为超疏水表面的发展提供新的视角。

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引用次数: 0

Response of surface micro-topography of monocrystalline silicon to physical characteristics of polishing pads 单晶硅表面微形貌对抛光垫物理特性的响应

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-09 DOI: 10.1016/j.precisioneng.2026.01.012

Yujie Liu , Lingzhong Li , Fukun Li , Guanbo Qiao , Haixiang Hu , Yang Bai , Xuejun Zhang

X-ray mirrors commonly employ monocrystalline silicon as the core optical element, whose surface roughness directly impacts the transmission efficiency and spot quality of the light source system. For X-ray mirrors, an initial polishing stage employing a polishing pad, to achieve superior surface roughness under conditions of high-efficiency material removal and figure convergence, thereby enabling high-precision and highly efficient manufacturing. This study investigates the correlation mechanism between polishing pad characteristics and the surface roughness of monocrystalline silicon, this study established a contact mechanics model for the polishing pad monocrystalline silicon interface. Systematic experiments and simulation analyses revealed the governing rules of asperity morphology on surface quality. The results indicate that polishing pads with a high elastic modulus exhibit superior dynamic conformity to the surface topography, a larger elastic contact ratio, more concentrated contact pressure, and more uniform local pressure. Polishing pads with low surface roughness demonstrate excellent spatial uniformity in asperity height distribution, facilitating the formation of an effective support network where asperities undergo coordinated deformation, leading to uniform stress distribution during polishing. Under optimized colloidal silica slurry concentration, the polishing pad featuring high elastic modulus and low surface roughness yielded the best monocrystalline silicon surface quality. Surface roughness measured by White Light Interferometry (Zogo 10X) reached 0.237 nm, while characterization via Atomic Force Microscopy (AFM) achieved 0.0807 nm. This study provides guidance for the selection and optimization of polishing pads in the manufacturing of high-precision optical components.

x射线反射镜通常采用单晶硅作为核心光学元件，其表面粗糙度直接影响光源系统的透射效率和光斑质量。对于x射线反射镜，采用抛光垫的初始抛光阶段，在高效去除材料和图形收敛的条件下实现卓越的表面粗糙度，从而实现高精度和高效率的制造。本研究探讨了抛光垫特性与单晶硅表面粗糙度的相关机理，建立了抛光垫与单晶硅界面的接触力学模型。系统的实验和仿真分析揭示了粗糙形貌对表面质量的控制规律。结果表明：高弹性模量抛光垫与表面形貌的动态一致性好，弹性接触比大，接触压力更集中，局部压力更均匀；表面粗糙度低的抛光垫在凹凸度高度分布上具有良好的空间均匀性，有利于形成有效的支撑网络，使凹凸度协同变形，从而使抛光过程中的应力分布均匀。在优化的硅胶浆浓度下，高弹性模量、低表面粗糙度的抛光垫获得了最佳的单晶硅表面质量。通过白光干涉（Zogo 10X）测量的表面粗糙度达到0.237 nm，而通过原子力显微镜（AFM）表征的表面粗糙度达到0.0807 nm。该研究为高精度光学元件制造中抛光垫的选择和优化提供了指导。

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引用次数: 0

Quasi-static self-sensing piezoelectric actuator position control with complex permittivity-enhanced hybrid neural network 基于复介电常数增强混合神经网络的准静态自传感压电驱动器位置控制

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-08 DOI: 10.1016/j.precisioneng.2026.01.010

Chuhang Lin , Yanbo Wang , Tatsuki Sasamura , Sze Keat Chee , Takeshi Morita

This paper proposes a high-precision self-sensing method for piezoelectric actuators using a hybrid neural network that integrates complex permittivity information. The proposed method addresses the limitations of conventional permittivity-based self-sensing, which typically exhibits approximately 1% remaining hysteresis. A knowledge-based polynomial model is first employed to capture the primary displacement–permittivity relationship. To enhance accuracy, a neural network is then introduced to compensate for residual nonlinearity using the input voltage, permittivity, and leakage current as its inputs. Experimental validation was conducted on a one-degree-of-freedom (1-DOF) push–pull stage with a stroke of approximately 9

μ

m. The results demonstrate that the proposed framework achieves a root mean square (RMS) prediction error of 9 nm across the entire stroke. Furthermore, the trained estimator is deployed in a closed-loop proportional–integral(PI) controller for completely sensorless step positioning, maintaining steady-state errors within

\pm

25 nm. These results represent a significant improvement over conventional permittivity-based and other existing self-sensing approaches, confirming the effectiveness of integrating piezoelectric self-sensing with machine learning for high-precision displacement estimation and real-time control.

本文提出了一种利用混合神经网络集成复杂介电常数信息的压电执行器高精度自感知方法。提出的方法解决了传统的基于介电常数的自传感的局限性，传统的自传感通常表现出大约1%的剩余滞后。首先采用基于知识的多项式模型来捕捉初级位移-介电常数关系。为了提高精度，引入神经网络以输入电压、介电常数和漏电流作为输入来补偿剩余非线性。在行程约为9 μm的1自由度推挽平台上进行了实验验证。结果表明，该框架在整个行程内实现了9 nm的均方根（RMS）预测误差。此外，训练后的估计器部署在闭环比例积分（PI）控制器中，用于完全无传感器的阶跃定位，将稳态误差保持在±25 nm内。这些结果代表了传统的基于介电常数和其他现有自传感方法的重大改进，证实了将压电自传感与机器学习相结合用于高精度位移估计和实时控制的有效性。

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引用次数: 0

Development of a pneumatic damping approach for wire tension control in micro wire electrical discharge machining 微丝电火花加工中丝张力气动阻尼控制方法的研究

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-08 DOI: 10.1016/j.precisioneng.2026.01.011

Shun-Tong Chen, Ying-Dan Chen

This study addresses the technical bottleneck of wire tension control in micro wire electrical discharge machining (micro w-EDM) by proposing an original pneumatic damper design capable of stabilizing the tension of a 20 μm-diameter brass wire and improving machining stability and precision. Conventional mechanical and magnetic tension-control mechanisms often suffer from friction, hysteresis, and backlash effects when applied to micron-scale wires, resulting in unstable wire feeding and dimensional inaccuracy. The developed pneumatic damping approach generates both axial and circumferential damping forces through controllable chamber pressure. A mathematical model relating chamber pressure to wire tension was established and integrated into a precision wire-cut EDM platform. Experimental results indicate that a chamber pressure of 1.6 MPa consistently produces a wire tension of 43.2 gf, corresponding to a minimum kerf width of approximately 24 μm and a unilateral discharge gap of only 2 μm. Under an optimal discharge capacitance of 200 pF, an average kerf width of 23.74 μm, a standard deviation of 0.43 μm, and a surface roughness of Ra 0.63 μm were achieved. A feed-rate of 0.04 mm/min yielded the lowest discharge short circuit ratio (DSCR), enhancing process repeatability. Further, validation of the machined slanted-tip microprobe array and spiral microstructures demonstrated highly consistent morphology in SEM analyses, with kerf width error below 1 μm and slope deviation within 0.005. These results confirm that the proposed pneumatic damping approach provides stable vibration absorption and precise tension control, significantly improving the machining quality of nonlinear microstructures and offering a significant advancement in micro wire tension control technology.

针对微丝电火花加工（micro w-EDM）中丝张力控制的技术瓶颈，提出了一种新颖的气动阻尼器设计，能够稳定20 μm直径黄铜丝的张力，提高加工的稳定性和精度。传统的机械和磁性张力控制机构在应用于微米尺度的金属丝时经常受到摩擦、滞后和间隙效应的影响，导致送丝不稳定和尺寸不精确。所开发的气动阻尼方法通过可控腔室压力产生轴向和周向阻尼力。建立了腔室压力与线材张力关系的数学模型，并将其集成到精密线切割电火花加工平台中。实验结果表明，在1.6 MPa的腔室压力下，导线张力始终保持在43.2 gf，对应的最小切口宽度约为24 μm，单边放电间隙仅为2 μm。在最佳放电电容为200 pF时，平均切口宽度为23.74 μm，标准偏差为0.43 μm，表面粗糙度为0.63 μm。进料速率为0.04 mm/min时，放电短路率（DSCR）最低，提高了工艺的重复性。此外，加工后的斜尖微探针阵列和螺旋微结构在SEM分析中显示出高度一致的形貌，切口宽度误差在1 μm以下，斜率偏差在0.005以内。结果表明，气动阻尼方法具有稳定的振动吸收和精确的张力控制，显著提高了非线性微结构的加工质量，是微细丝张力控制技术的重大进步。

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引用次数: 0

Conformal pulse electrochemical polishing of complex valve core components 复杂阀芯部件的共形脉冲电化学抛光

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-06 DOI: 10.1016/j.precisioneng.2026.01.009

Wei Sun , Shenglong Zhang , Xiaozhe Yang , Xu Yang

Medium-carbon steel valve cores are critical precision components in digital hydraulic systems, requiring exceptional surface quality and dimensional accuracy. Electrochemical polishing (ECP) is an efficient, non-destructive surface finishing technique that has been extensively employed for a variety of metallic components. However, existing polishing methods for valve cores with complex features, including stepped geometries, continue to encounter challenges in achieving both conformality and high surface quality. In this study, a novel Pulse Electrochemical Conformal Polishing (PECP) technique is proposed and systematically evaluated for its applicability to medium-carbon steel valve cores. The conformal polishing mechanism is elucidated by analyzing the interplay of periodic salt film formation and electric field distribution during the PECP process. Subsequently, experiments were conducted with various pulse widths (0.1 s, 0.5 s, 1 s, 2 s, and 3 s) to investigate their influence on surface roughness, profile conformity, and bubble behavior. The results indicate that a pulse width of 2 s achieves optimal surface quality, reducing surface roughness (Sa) from 1.365 μm to 0.920 μm. Building upon these findings, the introduction of rotational motion further enhanced polishing performance, lowering the surface roughness Sa to 0.599 μm. Finally, in-situ high-speed imaging visualized the mechanisms of bubble formation and evolution during the polishing process, confirming the validity of the proposed polishing mechanism. This study provides a novel approach by successfully integrating pulse electrochemical polishing to not only improve surface quality but also, in combination with the salt film theory, achieve conformal polishing of complex workpieces. This method overcomes the challenge that traditional ECP techniques face in maintaining geometry, offering an effective solution for high-precision conformal polishing of complex stepped components.

中碳钢阀芯是数字液压系统中的关键精密部件，要求卓越的表面质量和尺寸精度。电化学抛光（ECP）是一种高效、无损的表面处理技术，已广泛应用于各种金属部件。然而，对于具有复杂特征（包括阶梯几何形状）的阀芯，现有的抛光方法在实现一致性和高表面质量方面仍然面临挑战。本文提出了一种新型脉冲电化学共形抛光（PECP）技术，并对其在中碳钢阀芯上的适用性进行了系统评价。通过分析PECP过程中周期性盐膜形成与电场分布的相互作用，阐明了共形抛光机理。随后，进行了不同脉冲宽度（0.1 s、0.5 s、1 s、2 s和3 s）的实验，以研究它们对表面粗糙度、轮廓一致性和气泡行为的影响。结果表明，当脉冲宽度为2 s时，表面粗糙度（Sa）由1.365 μm降至0.920 μm，达到最佳表面质量。基于这些发现，旋转运动的引入进一步提高了抛光性能，将表面粗糙度Sa降低到0.599 μm。最后，利用原位高速成像技术对抛光过程中气泡的形成和演化机理进行了可视化分析，验证了所提抛光机理的有效性。该研究为脉冲电化学抛光提供了一种新的方法，不仅可以提高表面质量，而且可以结合盐膜理论实现复杂工件的保形抛光。该方法克服了传统ECP技术在保持几何形状方面所面临的挑战，为复杂阶跃部件的高精度保形抛光提供了有效的解决方案。

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引用次数: 0

A comparative study of precision abrasive machining using a customized novel additively manufactured flexible tool 定制新型增材制造柔性刀具精密磨料加工的对比研究

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-06 DOI: 10.1016/j.precisioneng.2026.01.008

Dawid Zieliński , Tesfaye Mengesha Medibew , Sisay Workineh Agebo , Mariusz Deja

Currently, research is investigating how advancements in abrasive machining, a post-processing method in manufacturing, can benefit from additive manufacturing (AM) technology. The study evaluated the machining performance of flexible abrasive tools produced by mSLA with ABS-like resin + and ABS-like resin V2, FDM with ABS and TPU, and SLS with PA12 industrial for processing 41Cr4 alloy steel samples. The portable 5-axis CNC milling machine conducted extensive machining trials on 41Cr4 alloy steel samples at various depths of cut (0.1–0.3 mm) to assess material removal rates, surface quality parameters, and tool wear behavior. The study investigated how technology affected specimen material loss through surface quality evaluation by measuring 2D (Wt) and 3D (Sa, Sz) roughness and waviness parameters using a 3D optical profilometer. The research showed TPU tools delivered superior surface quality but achieved lower material removal rates. The mass material removal rates of SLS-printed PA12 industrial tools exceeded those of ABS tools while maintaining stability under machining conditions. The performance of resin-based tools declined due to excessive tool wear, which resulted from their brittle nature. The study also suggested specific applications for the materials, indicating where they are most effective for removing aggressive materials. Resin-based tools excel in shallow-depth precision work, while TPU tools are well-suited for precision finishing tasks. The research reveals critical performance trade-offs in precision abrasive machining operations, while demonstrating the ability of AM to generate customized abrasive tools.

目前，研究人员正在研究如何从增材制造（AM）技术中受益于磨料加工（制造中的后处理方法）的进步。研究评价了ABS-like resin +和ABS-like resin V2的mSLA、ABS-like resin +和TPU的FDM、PA12 industrial的SLS柔性磨具加工41Cr4合金钢试样的加工性能。便携式五轴数控铣床对41Cr4合金钢样品进行了不同切削深度（0.1-0.3 mm）的大量加工试验，以评估材料去除率、表面质量参数和刀具磨损行为。该研究通过使用3D光学轮廓仪测量2D （Wt）和3D （Sa, Sz）粗糙度和波浪度参数，通过表面质量评估来研究技术如何影响样品材料损失。研究表明，TPU工具具有优异的表面质量，但材料去除率较低。sls打印PA12工业刀具的质量材料去除率超过ABS刀具，同时在加工条件下保持稳定性。由于树脂基刀具的脆性，导致刀具过度磨损，导致刀具性能下降。该研究还提出了这些材料的具体应用，指出了它们在去除腐蚀性材料方面最有效的地方。树脂基工具在浅深度精密工作中表现出色，而TPU工具则非常适合精密加工任务。该研究揭示了精密磨料加工操作中的关键性能权衡，同时展示了增材制造生成定制磨具的能力。

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引用次数: 0

In-situ monitoring and regulation of surface shape in swing fixed abrasive lapping of BK7 glass BK7玻璃摆动固定磨料研磨表面形状的现场监测与调控

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-03 DOI: 10.1016/j.precisioneng.2026.01.003

Ning Liu , Jingyi Jia , Chao Tang , Pengfei Wu , Jun Li , Jianbin Wang , Yongwei Zhu

Fixed abrasive lapping is a critical process that affects the surface accuracy of optical components, its machining accuracy directly determines the overall imaging performance of optical parts. However, the surface shape of the workpiece during lapping is time-varying, and the convergence timing is judged by the operator's experience and offline measurement results, which introduces great uncertainty into subsequent process control. To acquire the surface shape status of the workpiece and improve its controllability, this study established a multi-source information acquisition platform for swing fixed abrasive lapping (SFAL). The spindle motor current signal U1, eccentric wheel motor current signal U2, and acoustic emission (AE) signal were fused at the feature level based on multi-sensor information fusion technology. A random forest classification model optimized by the sparrow search algorithm (SSA-RF) was employed to achieve in-situ monitoring of workpiece surface shape category (convex, flat, concave). Based on the kinematic model of SFAL, the distribution of abrasive sliding distance under different parameter combinations was investigated, and process regulation strategies were proposed for convex and concave workpieces. The results indicated that when the fused signal features were used as input, the prediction accuracy of the SSA-RF model improved by more than 15 %, and a classification accuracy of 89.83 % for workpiece surface shape was achieved. For workpieces that do not meet the convergence condition, process regulation can be adopted to change the distribution of abrasive sliding distance on the workpiece surface, thereby facilitating the evolution toward surface flattening. After process regulation, the peak-to-valley (PV) value of the convex workpiece surface profile converged to 1.72 μm; The surface shape convergence efficiency of the concave workpiece in the early processing stage was improved, and the surface profile PV value finally converged to 1.29 μm. This study provides a theoretical foundation and technical approach for the high-precision machining and intelligent development of optical components.

固定磨料研磨是影响光学部件表面精度的关键工艺，其加工精度直接决定了光学部件的整体成像性能。然而，在研磨过程中，工件的表面形状是时变的，收敛时间是由操作员的经验和离线测量结果来判断的，这给后续的过程控制带来了很大的不确定性。为获取工件表面形状状态，提高其可控性，建立了摆动固定磨料研磨（SFAL）多源信息采集平台。基于多传感器信息融合技术，对主轴电机电流信号U1、偏心轮电机电流信号U2和声发射信号进行特征级融合。采用麻雀搜索算法（SSA-RF）优化的随机森林分类模型，实现了工件表面形状类别（凸、平、凹）的现场监测。基于sal的运动学模型，研究了不同参数组合下磨料滑动距离的分布，提出了凸、凹工件的工艺调整策略。结果表明，当采用融合信号特征作为输入时，SSA-RF模型的预测精度提高了15%以上，对工件表面形状的分类精度达到89.83%。对于不满足会聚条件的工件，可以通过工艺调节来改变磨料在工件表面的滑动距离分布，从而促进工件表面向平坦化方向发展。经过工艺调整后，凸工件表面轮廓的峰谷值收敛到1.72 μm；提高了加工初期凹形工件的曲面形状收敛效率，最终曲面轮廓PV值收敛到1.29 μm。该研究为光学元件的高精度加工和智能化发展提供了理论基础和技术途径。

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引用次数: 0

Relationship between machining accuracy and fractal dimension of rolling bearing raceway surfaces: A spectral bandwidth-driven surface quality evaluation method 滚动轴承滚道表面分形维数与加工精度的关系：一种频谱带宽驱动的表面质量评价方法

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-03 DOI: 10.1016/j.precisioneng.2026.01.007

Ning Feng, Yaqian Wang, Liqin Wang, Yulin Liu

The microscopic morphology of rolling bearing raceways (main load surface MLS) governs tribological performance under extreme conditions, yet conventional roughness parameters fail to characterize cross-scale features. This study proposes a dual-parameter method integrating fractal dimension D (via power spectral density analysis) and spectral width Δα (via multifractal detrended fluctuation analysis) to evaluate surface topography. Results show a negative correlation between D and bearing precision while Δα discriminates surface variations within the same grade. The synergistic D–Δα model enables comprehensive surface characterization by combining global complexity and local heterogeneity, providing a quantitative framework for precision manufacturing and reliability assessment of bearings.

滚动轴承滚道（主载荷面MLS）的微观形貌决定了极端条件下的摩擦学性能，而传统的粗糙度参数无法表征跨尺度特征。本研究提出一种分形维数D（通过功率谱密度分析）和谱宽Δα（通过多重分形去趋势波动分析）的双参数方法来评价地表形貌。结果表明，D与轴承精度呈负相关，而Δα区分同一等级内的表面变化。协同D -Δα模型通过结合全局复杂性和局部异质性，实现全面的表面表征，为轴承的精密制造和可靠性评估提供定量框架。

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