Pub Date : 2026-05-01Epub Date: 2026-01-08DOI: 10.1016/j.precisioneng.2026.01.010
Chuhang Lin , Yanbo Wang , Tatsuki Sasamura , Sze Keat Chee , Takeshi Morita
This paper proposes a high-precision self-sensing method for piezoelectric actuators using a hybrid neural network that integrates complex permittivity information. The proposed method addresses the limitations of conventional permittivity-based self-sensing, which typically exhibits approximately 1% remaining hysteresis. A knowledge-based polynomial model is first employed to capture the primary displacement–permittivity relationship. To enhance accuracy, a neural network is then introduced to compensate for residual nonlinearity using the input voltage, permittivity, and leakage current as its inputs. Experimental validation was conducted on a one-degree-of-freedom (1-DOF) push–pull stage with a stroke of approximately 9 m. The results demonstrate that the proposed framework achieves a root mean square (RMS) prediction error of 9 nm across the entire stroke. Furthermore, the trained estimator is deployed in a closed-loop proportional–integral(PI) controller for completely sensorless step positioning, maintaining steady-state errors within 25 nm. These results represent a significant improvement over conventional permittivity-based and other existing self-sensing approaches, confirming the effectiveness of integrating piezoelectric self-sensing with machine learning for high-precision displacement estimation and real-time control.
{"title":"Quasi-static self-sensing piezoelectric actuator position control with complex permittivity-enhanced hybrid neural network","authors":"Chuhang Lin , Yanbo Wang , Tatsuki Sasamura , Sze Keat Chee , Takeshi Morita","doi":"10.1016/j.precisioneng.2026.01.010","DOIUrl":"10.1016/j.precisioneng.2026.01.010","url":null,"abstract":"<div><div>This paper proposes a high-precision self-sensing method for piezoelectric actuators using a hybrid neural network that integrates complex permittivity information. The proposed method addresses the limitations of conventional permittivity-based self-sensing, which typically exhibits approximately 1% remaining hysteresis. A knowledge-based polynomial model is first employed to capture the primary displacement–permittivity relationship. To enhance accuracy, a neural network is then introduced to compensate for residual nonlinearity using the input voltage, permittivity, and leakage current as its inputs. Experimental validation was conducted on a one-degree-of-freedom (1-DOF) push–pull stage with a stroke of approximately 9 <span><math><mi>μ</mi></math></span>m. The results demonstrate that the proposed framework achieves a root mean square (RMS) prediction error of 9 nm across the entire stroke. Furthermore, the trained estimator is deployed in a closed-loop proportional–integral(PI) controller for completely sensorless step positioning, maintaining steady-state errors within <span><math><mo>±</mo></math></span>25 nm. These results represent a significant improvement over conventional permittivity-based and other existing self-sensing approaches, confirming the effectiveness of integrating piezoelectric self-sensing with machine learning for high-precision displacement estimation and real-time control.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 214-220"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145978557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-03DOI: 10.1016/j.precisioneng.2026.01.003
Ning Liu , Jingyi Jia , Chao Tang , Pengfei Wu , Jun Li , Jianbin Wang , Yongwei Zhu
Fixed abrasive lapping is a critical process that affects the surface accuracy of optical components, its machining accuracy directly determines the overall imaging performance of optical parts. However, the surface shape of the workpiece during lapping is time-varying, and the convergence timing is judged by the operator's experience and offline measurement results, which introduces great uncertainty into subsequent process control. To acquire the surface shape status of the workpiece and improve its controllability, this study established a multi-source information acquisition platform for swing fixed abrasive lapping (SFAL). The spindle motor current signal U1, eccentric wheel motor current signal U2, and acoustic emission (AE) signal were fused at the feature level based on multi-sensor information fusion technology. A random forest classification model optimized by the sparrow search algorithm (SSA-RF) was employed to achieve in-situ monitoring of workpiece surface shape category (convex, flat, concave). Based on the kinematic model of SFAL, the distribution of abrasive sliding distance under different parameter combinations was investigated, and process regulation strategies were proposed for convex and concave workpieces. The results indicated that when the fused signal features were used as input, the prediction accuracy of the SSA-RF model improved by more than 15 %, and a classification accuracy of 89.83 % for workpiece surface shape was achieved. For workpieces that do not meet the convergence condition, process regulation can be adopted to change the distribution of abrasive sliding distance on the workpiece surface, thereby facilitating the evolution toward surface flattening. After process regulation, the peak-to-valley (PV) value of the convex workpiece surface profile converged to 1.72 μm; The surface shape convergence efficiency of the concave workpiece in the early processing stage was improved, and the surface profile PV value finally converged to 1.29 μm. This study provides a theoretical foundation and technical approach for the high-precision machining and intelligent development of optical components.
{"title":"In-situ monitoring and regulation of surface shape in swing fixed abrasive lapping of BK7 glass","authors":"Ning Liu , Jingyi Jia , Chao Tang , Pengfei Wu , Jun Li , Jianbin Wang , Yongwei Zhu","doi":"10.1016/j.precisioneng.2026.01.003","DOIUrl":"10.1016/j.precisioneng.2026.01.003","url":null,"abstract":"<div><div>Fixed abrasive lapping is a critical process that affects the surface accuracy of optical components, its machining accuracy directly determines the overall imaging performance of optical parts. However, the surface shape of the workpiece during lapping is time-varying, and the convergence timing is judged by the operator's experience and offline measurement results, which introduces great uncertainty into subsequent process control. To acquire the surface shape status of the workpiece and improve its controllability, this study established a multi-source information acquisition platform for swing fixed abrasive lapping (SFAL). The spindle motor current signal U1, eccentric wheel motor current signal U2, and acoustic emission (AE) signal were fused at the feature level based on multi-sensor information fusion technology. A random forest classification model optimized by the sparrow search algorithm (SSA-RF) was employed to achieve in-situ monitoring of workpiece surface shape category (convex, flat, concave). Based on the kinematic model of SFAL, the distribution of abrasive sliding distance under different parameter combinations was investigated, and process regulation strategies were proposed for convex and concave workpieces. The results indicated that when the fused signal features were used as input, the prediction accuracy of the SSA-RF model improved by more than 15 %, and a classification accuracy of 89.83 % for workpiece surface shape was achieved. For workpieces that do not meet the convergence condition, process regulation can be adopted to change the distribution of abrasive sliding distance on the workpiece surface, thereby facilitating the evolution toward surface flattening. After process regulation, the peak-to-valley (PV) value of the convex workpiece surface profile converged to 1.72 μm; The surface shape convergence efficiency of the concave workpiece in the early processing stage was improved, and the surface profile PV value finally converged to 1.29 μm. This study provides a theoretical foundation and technical approach for the high-precision machining and intelligent development of optical components.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 122-139"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928260","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-12DOI: 10.1016/j.precisioneng.2026.01.014
Zelong Li , Yifan Dai , Chao liang Guan , Tao Lai , Hao Hu
On-machine measurement technologies can improve manufacturing efficiency and precision with broad applicability. For three-axis machine tools, measuring and compensating for 21 geometric errors is essential to improve measurement accuracy. Multibody models are widely used to establish volumetric error models, but the coordinate systems lack a clear definition. There is a large Abbe error when the actual measurement point and the ideal measurement point are not aligned. Therefore, this paper proposes a novel on-machine measurement spatial-error modeling and compensation approach by establishing measurement error transformation matrices. This method can eliminate Abbe error during measurement and improve the accuracy of spatial error compensation in on-machine measurement. Through experimental verification, measurement accuracy was improved by 86.4 % after spatial error compensation.
{"title":"On-machine measurement error modeling and compensation in three-axis machine tools based on measurement error transformation matrices","authors":"Zelong Li , Yifan Dai , Chao liang Guan , Tao Lai , Hao Hu","doi":"10.1016/j.precisioneng.2026.01.014","DOIUrl":"10.1016/j.precisioneng.2026.01.014","url":null,"abstract":"<div><div>On-machine measurement technologies can improve manufacturing efficiency and precision with broad applicability. For three-axis machine tools, measuring and compensating for 21 geometric errors is essential to improve measurement accuracy. Multibody models are widely used to establish volumetric error models, but the coordinate systems lack a clear definition. There is a large Abbe error when the actual measurement point and the ideal measurement point are not aligned. Therefore, this paper proposes a novel on-machine measurement spatial-error modeling and compensation approach by establishing measurement error transformation matrices. This method can eliminate Abbe error during measurement and improve the accuracy of spatial error compensation in on-machine measurement. Through experimental verification, measurement accuracy was improved by 86.4 % after spatial error compensation.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 346-353"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146023390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Mid-spatial-frequency (MSF) waviness — typically characterized by waviness with spatial period ranging from 0.1 mm to several millimeters — significantly impacts the optical performance of precision optics. In diamond-machined optical surfaces, trajectory variations of the machine tool can induce MSF waviness that are difficult to eliminate through conventional polishing due to their spatial frequency range. It is therefore crucial to measure and compensate for machine tool control error in real-time during the cutting process. To address this issue, we developed a real-time position capturing system (RPCS) to assess the control errors of three types of ultra-precision machine tools, with programming resolutions on linear axes ranging from 10 nm to 0.1 nm. First, we evaluated the profile accuracy of optical flat and spherical mirror on each machine tool using on-machine measurement (OMM) with a laser confocal probe, to verify linear motion accuracy. Subsequently, we manufactured three plano-elliptic optical surfaces — intended for neutron-focusing mirrors — using the respective machine tools. We then analyzed the MSF waviness of the machined mirrors and correlated it with the motion errors captured by the RPCS. Our results revealed that the machine equipped with oil hydrostatic guideways exhibited a control error of approximately 100 nm and produced MSF waviness with an amplitude around 10 nm. In contrast, machines with V–V roller guideways demonstrated significantly lower MSF amplitudes, below 10 nm. These findings demonstrate a clear correlation between guideway structure, trajectory stability, and MSF waviness, providing valuable insights for improving the precision of optics fabrication.
{"title":"Mid-spatial-frequency waviness in ultra-precision machining: Real-time trajectory analysis of three machine tools","authors":"Yan Wei , Masahiro Takeda , Takuya Hosobata , Yutaka Yamagata , Shinya Morita","doi":"10.1016/j.precisioneng.2025.12.019","DOIUrl":"10.1016/j.precisioneng.2025.12.019","url":null,"abstract":"<div><div>Mid-spatial-frequency (MSF) waviness — typically characterized by waviness with spatial period ranging from 0.1 mm to several millimeters — significantly impacts the optical performance of precision optics. In diamond-machined optical surfaces, trajectory variations of the machine tool can induce MSF waviness that are difficult to eliminate through conventional polishing due to their spatial frequency range. It is therefore crucial to measure and compensate for machine tool control error in real-time during the cutting process. To address this issue, we developed a real-time position capturing system (RPCS) to assess the control errors of three types of ultra-precision machine tools, with programming resolutions on linear axes ranging from 10 nm to 0.1 nm. First, we evaluated the profile accuracy of optical flat and spherical mirror on each machine tool using on-machine measurement (OMM) with a laser confocal probe, to verify linear motion accuracy. Subsequently, we manufactured three plano-elliptic optical surfaces — intended for neutron-focusing mirrors — using the respective machine tools. We then analyzed the MSF waviness of the machined mirrors and correlated it with the motion errors captured by the RPCS. Our results revealed that the machine equipped with oil hydrostatic guideways exhibited a control error of approximately 100 nm and produced MSF waviness with an amplitude around 10 nm. In contrast, machines with V–V roller guideways demonstrated significantly lower MSF amplitudes, below 10 nm. These findings demonstrate a clear correlation between guideway structure, trajectory stability, and MSF waviness, providing valuable insights for improving the precision of optics fabrication.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 37-44"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928362","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2025-12-29DOI: 10.1016/j.precisioneng.2025.12.018
Hongda Shen , Kang Li , Runxia Zhang , Huanxiong Xia , Jianhua Liu , Xuerui Zhang , Guorui Zhang , Xin Liu
Non-ideal surface mating with multiple bolts is an important assembly structure in precision optical mirrors. However, determining the optimal torque for each bolt under the non-ideal contact of structural mating surfaces remains challenging. This paper develops an integrated optimization strategy that synergizes experimental analysis, finite element modeling, and intelligent algorithms to address this challenge. Mirror assembly experiments show that both non-ideal morphology and bolt torque significantly affect assembly accuracy. Simulations reveal non-uniform contact pressure arising from non-ideal surface morphology during assembly. A Genetic Algorithm-Backpropagation (GA-BP) neural network mapping bolt torque to assembly accuracy is integrated with a genetic algorithm to determine the optimal torque configuration. Experimental and numerical validations confirm the strategy's efficacy, achieving an average reduction in assembly-induced surface-figure Root Mean Square (RMS) of 36.09 %. The proposed approach provides a practical solution for the precision assembly of multi-bolt structures, effectively mitigating the adverse effects of non-ideal mating surfaces.
{"title":"Optimization of multi-bolt assembled precision optical mirrors considering non-ideal mating surfaces","authors":"Hongda Shen , Kang Li , Runxia Zhang , Huanxiong Xia , Jianhua Liu , Xuerui Zhang , Guorui Zhang , Xin Liu","doi":"10.1016/j.precisioneng.2025.12.018","DOIUrl":"10.1016/j.precisioneng.2025.12.018","url":null,"abstract":"<div><div>Non-ideal surface mating with multiple bolts is an important assembly structure in precision optical mirrors. However, determining the optimal torque for each bolt under the non-ideal contact of structural mating surfaces remains challenging. This paper develops an integrated optimization strategy that synergizes experimental analysis, finite element modeling, and intelligent algorithms to address this challenge. Mirror assembly experiments show that both non-ideal morphology and bolt torque significantly affect assembly accuracy. Simulations reveal non-uniform contact pressure arising from non-ideal surface morphology during assembly. A Genetic Algorithm-Backpropagation (GA-BP) neural network mapping bolt torque to assembly accuracy is integrated with a genetic algorithm to determine the optimal torque configuration. Experimental and numerical validations confirm the strategy's efficacy, achieving an average reduction in assembly-induced surface-figure Root Mean Square (RMS) of 36.09 %. The proposed approach provides a practical solution for the precision assembly of multi-bolt structures, effectively mitigating the adverse effects of non-ideal mating surfaces.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 1-11"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145852499","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-08DOI: 10.1016/j.precisioneng.2026.01.011
Shun-Tong Chen, Ying-Dan Chen
This study addresses the technical bottleneck of wire tension control in micro wire electrical discharge machining (micro w-EDM) by proposing an original pneumatic damper design capable of stabilizing the tension of a 20 μm-diameter brass wire and improving machining stability and precision. Conventional mechanical and magnetic tension-control mechanisms often suffer from friction, hysteresis, and backlash effects when applied to micron-scale wires, resulting in unstable wire feeding and dimensional inaccuracy. The developed pneumatic damping approach generates both axial and circumferential damping forces through controllable chamber pressure. A mathematical model relating chamber pressure to wire tension was established and integrated into a precision wire-cut EDM platform. Experimental results indicate that a chamber pressure of 1.6 MPa consistently produces a wire tension of 43.2 gf, corresponding to a minimum kerf width of approximately 24 μm and a unilateral discharge gap of only 2 μm. Under an optimal discharge capacitance of 200 pF, an average kerf width of 23.74 μm, a standard deviation of 0.43 μm, and a surface roughness of Ra 0.63 μm were achieved. A feed-rate of 0.04 mm/min yielded the lowest discharge short circuit ratio (DSCR), enhancing process repeatability. Further, validation of the machined slanted-tip microprobe array and spiral microstructures demonstrated highly consistent morphology in SEM analyses, with kerf width error below 1 μm and slope deviation within 0.005. These results confirm that the proposed pneumatic damping approach provides stable vibration absorption and precise tension control, significantly improving the machining quality of nonlinear microstructures and offering a significant advancement in micro wire tension control technology.
{"title":"Development of a pneumatic damping approach for wire tension control in micro wire electrical discharge machining","authors":"Shun-Tong Chen, Ying-Dan Chen","doi":"10.1016/j.precisioneng.2026.01.011","DOIUrl":"10.1016/j.precisioneng.2026.01.011","url":null,"abstract":"<div><div>This study addresses the technical bottleneck of wire tension control in micro wire electrical discharge machining (micro w-EDM) by proposing an original pneumatic damper design capable of stabilizing the tension of a 20 μm-diameter brass wire and improving machining stability and precision. Conventional mechanical and magnetic tension-control mechanisms often suffer from friction, hysteresis, and backlash effects when applied to micron-scale wires, resulting in unstable wire feeding and dimensional inaccuracy. The developed pneumatic damping approach generates both axial and circumferential damping forces through controllable chamber pressure. A mathematical model relating chamber pressure to wire tension was established and integrated into a precision wire-cut EDM platform. Experimental results indicate that a chamber pressure of 1.6 MPa consistently produces a wire tension of 43.2 gf, corresponding to a minimum kerf width of approximately 24 μm and a unilateral discharge gap of only 2 μm. Under an optimal discharge capacitance of 200 pF, an average kerf width of 23.74 μm, a standard deviation of 0.43 μm, and a surface roughness of Ra 0.63 μm were achieved. A feed-rate of 0.04 mm/min yielded the lowest discharge short circuit ratio (DSCR), enhancing process repeatability. Further, validation of the machined slanted-tip microprobe array and spiral microstructures demonstrated highly consistent morphology in SEM analyses, with kerf width error below 1 μm and slope deviation within 0.005. These results confirm that the proposed pneumatic damping approach provides stable vibration absorption and precise tension control, significantly improving the machining quality of nonlinear microstructures and offering a significant advancement in micro wire tension control technology.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 172-185"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145978613","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-20DOI: 10.1016/j.precisioneng.2026.01.023
Qiqiang Sun , Mingzhu Yin , Shuxin Wang , Jinhua Li , Lizhi Pan
In biomedical applications, microgrippers made from single materials often compromise between precision and gentle interaction with biological specimens. To address this challenge, this paper presents a magnetically actuated microgripper with a functionally partitioned multi-material design, fabricated through a template-assisted assembly strategy. The microgripper comprises an M-shaped actuation unit fabricated from magnetorheological elastomer, a transmission unit produced through additive manufacturing using photosensitive resin, and an interaction unit formed with Ecoflex coating. This functionally partitioned multi-material design enables controlled magnetic actuation, accurate force and motion transmission, and compliant biological contact. To characterize and optimize the actuation performance, we employ the beam constraint model for deformation analysis of the actuation unit, and conduct finite element analysis to refine its dimensional parameters. Magnetic actuation is realized by a miniature coil mounted on the microgripper, allowing effective actuation without external magnetic setups. The template-assisted assembly ensures precise alignment and reliable integration of the functional units. Performance tests show that the microgripper achieves a gripping stroke exceeding 2000 m with a displacement resolution of approximately 1.5 m, and operates reliably over 300 cycles. Furthermore, the zebrafish embryonic cell manipulation experiment achieves a 100% success rate, with no noticeable adverse effects on cell viability or development. The measured gripping force during operation (0.13 mN) remains well below the cellular damage threshold, ensuring non-destructive manipulation. These results demonstrate the applicability of the microgripper for biological manipulation, with promising applications in cell handling, developmental biology, and minimally invasive biomedical procedures.
{"title":"A magnetically actuated microgripper with functionally partitioned multi-material design for cell manipulation","authors":"Qiqiang Sun , Mingzhu Yin , Shuxin Wang , Jinhua Li , Lizhi Pan","doi":"10.1016/j.precisioneng.2026.01.023","DOIUrl":"10.1016/j.precisioneng.2026.01.023","url":null,"abstract":"<div><div>In biomedical applications, microgrippers made from single materials often compromise between precision and gentle interaction with biological specimens. To address this challenge, this paper presents a magnetically actuated microgripper with a functionally partitioned multi-material design, fabricated through a template-assisted assembly strategy. The microgripper comprises an M-shaped actuation unit fabricated from magnetorheological elastomer, a transmission unit produced through additive manufacturing using photosensitive resin, and an interaction unit formed with Ecoflex coating. This functionally partitioned multi-material design enables controlled magnetic actuation, accurate force and motion transmission, and compliant biological contact. To characterize and optimize the actuation performance, we employ the beam constraint model for deformation analysis of the actuation unit, and conduct finite element analysis to refine its dimensional parameters. Magnetic actuation is realized by a miniature coil mounted on the microgripper, allowing effective actuation without external magnetic setups. The template-assisted assembly ensures precise alignment and reliable integration of the functional units. Performance tests show that the microgripper achieves a gripping stroke exceeding 2000 <span><math><mi>μ</mi></math></span>m with a displacement resolution of approximately 1.5 <span><math><mi>μ</mi></math></span>m, and operates reliably over 300 cycles. Furthermore, the zebrafish embryonic cell manipulation experiment achieves a 100% success rate, with no noticeable adverse effects on cell viability or development. The measured gripping force during operation (0.13 mN) remains well below the cellular damage threshold, ensuring non-destructive manipulation. These results demonstrate the applicability of the microgripper for biological manipulation, with promising applications in cell handling, developmental biology, and minimally invasive biomedical procedures.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 270-282"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146023459","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-19DOI: 10.1016/j.precisioneng.2026.01.020
Yuheng Gu, Yiteng Zhang, Jie Zhu, Mingxiang Ling
Piezoelectrically actuated nanopositioners based on compliant mechanisms have attracted considerable attention, due to their wide applications in all kinds of precision engineering fields. A vertical piezoelectric nanopositioner featuring a flat architecture and amplified strokes is designed, modeled and experimentally evaluated. The flexure structure is configured by combining a double parallelogram mechanism and a semi-bridge-type compliant amplification mechanism to reduce the vertical height, while retaining a relatively high lateral stiffness. The frequency-domain compliance of the designed flexure nanopositioner is straightforwardly established based on a three-dimensional dynamic compliance matrix method (DCM) to concurrently capture the kinetostatic and dynamic characteristics. The compliance-related indexes, such as the degrees of freedom and constraint, mobility, natural frequencies and harmonic resonance responses, are analyzed in a parametric way. The theoretical results are compared and verified with the finite element simulation and experimental testing, which exhibits a good agreement. The measuring results of a prototype indicate that it delivers a working stroke of 75 μm, output stiffness of 0.06 N/μm, lateral stiffness of 3.22 N/μm and fundamental resonance frequency of 1815 Hz with a compact size of 62 mm × 62 mm × 13 mm.
基于柔性机构的压电驱动纳米位移器由于其在各种精密工程领域的广泛应用而引起了广泛的关注。设计了一种具有平面结构和放大冲程的垂直压电纳米对立器，并对其进行了建模和实验评估。柔性结构采用双平行四边形机构和半桥式柔性放大机构组合配置，降低了垂直高度，同时保持了较高的横向刚度。基于三维动态柔度矩阵法（DCM）直接建立了柔性纳米机器人的频域柔度，同时捕捉了其动、静态特性。对柔性相关指标，如自由度和约束度、迁移率、固有频率和谐振响应进行了参数化分析。将理论计算结果与有限元模拟和实验测试结果进行了比较和验证，结果吻合较好。样机测量结果表明，该系统的工作行程为75 μm，输出刚度为0.06 N/μm，横向刚度为3.22 N/μm，基频为1815 Hz，结构尺寸为62 mm × 62 mm × 13 mm。
{"title":"Frequency-domain compliance design of a vertical flat piezoelectric flexure nanopositioner","authors":"Yuheng Gu, Yiteng Zhang, Jie Zhu, Mingxiang Ling","doi":"10.1016/j.precisioneng.2026.01.020","DOIUrl":"10.1016/j.precisioneng.2026.01.020","url":null,"abstract":"<div><div>Piezoelectrically actuated nanopositioners based on compliant mechanisms have attracted considerable attention, due to their wide applications in all kinds of precision engineering fields. A vertical piezoelectric nanopositioner featuring a flat architecture and amplified strokes is designed, modeled and experimentally evaluated. The flexure structure is configured by combining a double parallelogram mechanism and a semi-bridge-type compliant amplification mechanism to reduce the vertical height, while retaining a relatively high lateral stiffness. The frequency-domain compliance of the designed flexure nanopositioner is straightforwardly established based on a three-dimensional dynamic compliance matrix method (DCM) to concurrently capture the kinetostatic and dynamic characteristics. The compliance-related indexes, such as the degrees of freedom and constraint, mobility, natural frequencies and harmonic resonance responses, are analyzed in a parametric way. The theoretical results are compared and verified with the finite element simulation and experimental testing, which exhibits a good agreement. The measuring results of a prototype indicate that it delivers a working stroke of 75 μm, output stiffness of 0.06 N/μm, lateral stiffness of 3.22 N/μm and fundamental resonance frequency of 1815 Hz with a compact size of 62 mm × 62 mm × 13 mm.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 283-293"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146023460","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2025-12-23DOI: 10.1016/j.precisioneng.2025.12.010
Keying Yang, Hang Yu, Ming Kong, Jing Yu
To address the current lack of standardized evaluation systems and complete metrological traceability chains for flatness assessment algorithms, this study proposes a flatness digital measuring instrument model based on the minimum zone (MZ) method. By combining triangle and cross criteria, along with point cloud geometric feature analysis, barycentric coordinate methods, and projection techniques, a constraint framework satisfying the four fundamental sampling points is established. Based on rigorous mathematical and geometric derivations, a unified standard for constructing the flatness digital measuring instrument model is developed, and sampling procedures as well as reference model examples under different criteria are provided. Utilizing this model set and its implementation methodology, a series of validation experiments were conducted to assess the feasibility and applicability of various flatness evaluation algorithms and measurement software. Experimental results demonstrate that the proposed model is effective for verifying and evaluating flatness assessment algorithms, supporting accuracy validation down to 0.1 μm. This research provides a reproducible and traceable technical pathway for the standardized verification of flatness algorithms, supporting quality control in ultra-precision manufacturing.
{"title":"A study of flatness digital measuring instrument models for algorithmic validation of minimum zone method","authors":"Keying Yang, Hang Yu, Ming Kong, Jing Yu","doi":"10.1016/j.precisioneng.2025.12.010","DOIUrl":"10.1016/j.precisioneng.2025.12.010","url":null,"abstract":"<div><div>To address the current lack of standardized evaluation systems and complete metrological traceability chains for flatness assessment algorithms, this study proposes a flatness digital measuring instrument model based on the minimum zone (MZ) method. By combining triangle and cross criteria, along with point cloud geometric feature analysis, barycentric coordinate methods, and projection techniques, a constraint framework satisfying the four fundamental sampling points is established. Based on rigorous mathematical and geometric derivations, a unified standard for constructing the flatness digital measuring instrument model is developed, and sampling procedures as well as reference model examples under different criteria are provided. Utilizing this model set and its implementation methodology, a series of validation experiments were conducted to assess the feasibility and applicability of various flatness evaluation algorithms and measurement software. Experimental results demonstrate that the proposed model is effective for verifying and evaluating flatness assessment algorithms, supporting accuracy validation down to 0.1 μm. This research provides a reproducible and traceable technical pathway for the standardized verification of flatness algorithms, supporting quality control in ultra-precision manufacturing.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 23-36"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145886524","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-13DOI: 10.1016/j.precisioneng.2026.01.016
Zhao Han , Xu Han , Xiaolong Fang
Wire electrochemical machining (WECM) offers a promising solution for processing high-strength, high-hardness materials for aeroengine components. However, scattered corrosion and nonconcentrated electric fields hamper the process. In mitigation, pulse dynamic WECM (PD-WECM) has been proposed to optimize electric field distribution during cutting, significantly reducing slit width while achieving superior surface quality. This method involves categorizing the surface of the rotating electrode into active (work) and inactive (non-work) areas from a circumferential perspective. A chopping system is employed to synchronize power with work-area alignment, thereby concentrating the electric field and enhancing the mass transfer using wedged electrodes with insulating coatings. The chopping system reduces surface roughness to 0.59 μm, a 43 % decrease, and the wedged electrodes minimize slit width by 401 μm (17 %) compared to the result machined by circular electrode without the chopping system, thus enhancing mass transfer efficiency. Compared with continuous-electric-field WECM, our chopping technique is superior. Under conditions involving a 180° power-on angle using wedged electrodes with insulating coatings, we stabilized the slit sidewall roughness at ∼0.254 μm and maintained a slit width of ∼1.3 mm.
{"title":"Precision pulse dynamics wire electrochemical machining with structured electrodes","authors":"Zhao Han , Xu Han , Xiaolong Fang","doi":"10.1016/j.precisioneng.2026.01.016","DOIUrl":"10.1016/j.precisioneng.2026.01.016","url":null,"abstract":"<div><div>Wire electrochemical machining (WECM) offers a promising solution for processing high-strength, high-hardness materials for aeroengine components. However, scattered corrosion and nonconcentrated electric fields hamper the process. In mitigation, pulse dynamic WECM (PD-WECM) has been proposed to optimize electric field distribution during cutting, significantly reducing slit width while achieving superior surface quality. This method involves categorizing the surface of the rotating electrode into active (work) and inactive (non-work) areas from a circumferential perspective. A chopping system is employed to synchronize power with work-area alignment, thereby concentrating the electric field and enhancing the mass transfer using wedged electrodes with insulating coatings. The chopping system reduces surface roughness to 0.59 μm, a 43 % decrease, and the wedged electrodes minimize slit width by 401 μm (17 %) compared to the result machined by circular electrode without the chopping system, thus enhancing mass transfer efficiency. Compared with continuous-electric-field WECM, our chopping technique is superior. Under conditions involving a 180° power-on angle using wedged electrodes with insulating coatings, we stabilized the slit sidewall roughness at ∼0.254 μm and maintained a slit width of ∼1.3 mm.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 258-269"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146023458","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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