Influence of aluminum addition on structure, hardness, and oxidation resistance of Ta1−xAlxN thin films

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY Accounts of Chemical Research Pub Date : 2024-07-17 DOI:10.1002/sia.7343

Jonh Yago Erikson Santos, Iago Lemos Dias, Ronaldo Lima Rezende, Givanilson Brito de Oliveira, Pedro Cardoso da Silva Neto, Fabiana Magalhães Teixeira Mendes, Roberto Hübler, Eduardo Kirinus Tentardini

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Abstract

Ta1−xAlxN thin films with 5, 15, and 40 at.% Al addition were co‐deposited by reactive magnetron sputtering and characterized by Rutherford backscattering spectroscopy (RBS), grazing angle X‐ray diffraction (GAXRD), X‐ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), nanohardness, and oxidation tests. GAXRD and XPS analyses showed, regardless of the % Al added, the non‐existence of ternary nitride Ta1−xAlxN, but always as individual binary nitrides, TaN and AlN. Sample TaAlN_15 obtained the highest hardness and H3/E2 values, possibly due to the AlN grains presence, which were efficient in distorting the TaN lattice. All samples failed oxidation tests at 873 K, showing that the Al addition was not efficient in improving this property for tantalum aluminum nitride thin films.

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加铝对 Ta1-xAlxN 薄膜结构、硬度和抗氧化性的影响

通过反应磁控溅射共沉积了铝添加量分别为 5%、15% 和 40%的 Ta1-xAlxN 薄膜，并通过卢瑟福背散射光谱 (RBS)、掠角 X 射线衍射 (GAXRD)、X 射线光电子能谱 (XPS)、扫描电子显微镜 (SEM)、纳米硬度和氧化测试对其进行了表征。GAXRD 和 XPS 分析表明，无论添加的铝的百分比是多少，都不存在 Ta1-xAlxN 三元氮化物，而始终是单独的二元氮化物，即 TaN 和 AlN。样品 TaAlN_15 的硬度和 H3/E2 值最高，这可能是由于 AlN 晶粒的存在有效地扭曲了 TaN 晶格。所有样品都未能通过 873 K 氧化测试，这表明添加铝并不能有效改善钽氮化铝薄膜的这一特性。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.

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