Metasurface-integrated elliptically polarized laser-pumped SERF magnetometers.

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-07-19 eCollection Date: 2024-01-01 DOI:10.1038/s41378-024-00715-3
Zihua Liang, Jinsheng Hu, Peng Zhou, Lu Liu, Gen Hu, Ankang Wang, Mao Ye
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Abstract

The emergence of biomagnetism imaging has led to the development of ultrasensitive and compact spin-exchange relaxation-free (SERF) atomic magnetometers that promise high-resolution magnetocardiography (MCG) and magnetoencephalography (MEG). However, conventional optical components are not compatible with nanofabrication processes that enable the integration of atomic magnetometers on chips, especially for elliptically polarized laser-pumped SERF magnetometers with bulky optical systems. In this study, an elliptical-polarization pumping beam (at 795 nm) is achieved through a single-piece metasurface, which results in an SERF magnetometer with a high sensitivity reaching 10.61 fT/Hz1/2 by utilizing a 87Rb vapor cell with a 3 mm inner diameter. To achieve the optimum theoretical polarization, our design combines a computer-assisted optimization algorithm with an emerging metasurface design process. The metasurface is fabricated with 550 nm thick silicon-rich silicon nitride on a 2 × 2 cm 2 SiO2 substrate and features a 22.17° ellipticity angle (a deviation from the target polarization of less than 2%) and more than 80% transmittance. This study provides a feasible approach for on-chip polarization control of future all-integrated atomic magnetometers, which will further pave the way for high-resolution biomagnetism imaging and portable atomic sensing applications.

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元表面集成椭圆偏振激光泵浦 SERF 磁强计。
生物磁成像技术的兴起推动了超灵敏、紧凑型无自旋交换弛豫(SERF)原子磁强计的发展,有望实现高分辨率磁心动图(MCG)和脑磁图(MEG)。然而,传统的光学元件与可将原子磁强计集成到芯片上的纳米制造工艺不兼容,特别是对于具有笨重光学系统的椭圆偏振激光泵浦 SERF 磁强计而言。在这项研究中,椭圆极化泵浦光束(波长为 795 nm)通过单片元表面实现,从而利用内径为 3 mm 的 87Rb 蒸汽电池制造出灵敏度高达 10.61 fT/Hz1/2 的 SERF 磁强计。为了实现最佳理论极化,我们的设计结合了计算机辅助优化算法和新兴的元表面设计流程。元表面是在 2 × 2 cm 2 二氧化硅基底上用 550 nm 厚的富硅氮化硅制造的,椭圆角为 22.17°(与目标极化的偏差小于 2%),透射率超过 80%。这项研究为未来全集成原子磁强计的片上偏振控制提供了一种可行的方法,这将进一步为高分辨率生物磁成像和便携式原子传感应用铺平道路。
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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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