{"title":"Surface quality and microstructure evolution in fused silica under SF6/Ar reactive ion beam etching","authors":"","doi":"10.1016/j.jnoncrysol.2024.123144","DOIUrl":null,"url":null,"abstract":"<div><p>The SF<sub>6</sub>/Ar reactive ion beam etching (RIBE) was proposed to explore the evolution of surface quality, subsurface defects, surface molecular structure, and chemical composition of fused silica. Also, the mechanism of reactive ion beam etching of fused silica surfaces was discussed. The results show that RIBE can maintain the original surface roughness by choosing suitable process parameters. this etching process can suppress the replication and expansion of subsurface defects and the deposition of reactants without bringing obvious contamination. The concentration of structural defects reaches a minimum at an etching depth of about 2 μm. However, further etching may lead to an increase in the chemical structure defects on the surface. The evolution of the intrinsic ring structure demonstrates that most intrinsic defects tend to reorganize into short (Si-O) ring structures. The etching mechanisms of Ar ions were discussed by simulating the stopping power and energy deposition. Phonon dissipation through atomic displacements and atomic vibrations is an important way of energy loss. Phonon vibrations and atomic dislocations induced by nuclear collisions are not only important factors causing the enhancement of electron-phonon coupling but also important causes of surface structural defects. The researches provide a theoretical basis for in-depth understanding of fused silica surface defect repair.</p></div>","PeriodicalId":16461,"journal":{"name":"Journal of Non-crystalline Solids","volume":null,"pages":null},"PeriodicalIF":3.2000,"publicationDate":"2024-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Non-crystalline Solids","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0022309324003211","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, CERAMICS","Score":null,"Total":0}
引用次数: 0
Abstract
The SF6/Ar reactive ion beam etching (RIBE) was proposed to explore the evolution of surface quality, subsurface defects, surface molecular structure, and chemical composition of fused silica. Also, the mechanism of reactive ion beam etching of fused silica surfaces was discussed. The results show that RIBE can maintain the original surface roughness by choosing suitable process parameters. this etching process can suppress the replication and expansion of subsurface defects and the deposition of reactants without bringing obvious contamination. The concentration of structural defects reaches a minimum at an etching depth of about 2 μm. However, further etching may lead to an increase in the chemical structure defects on the surface. The evolution of the intrinsic ring structure demonstrates that most intrinsic defects tend to reorganize into short (Si-O) ring structures. The etching mechanisms of Ar ions were discussed by simulating the stopping power and energy deposition. Phonon dissipation through atomic displacements and atomic vibrations is an important way of energy loss. Phonon vibrations and atomic dislocations induced by nuclear collisions are not only important factors causing the enhancement of electron-phonon coupling but also important causes of surface structural defects. The researches provide a theoretical basis for in-depth understanding of fused silica surface defect repair.
期刊介绍:
The Journal of Non-Crystalline Solids publishes review articles, research papers, and Letters to the Editor on amorphous and glassy materials, including inorganic, organic, polymeric, hybrid and metallic systems. Papers on partially glassy materials, such as glass-ceramics and glass-matrix composites, and papers involving the liquid state are also included in so far as the properties of the liquid are relevant for the formation of the solid.
In all cases the papers must demonstrate both novelty and importance to the field, by way of significant advances in understanding or application of non-crystalline solids; in the case of Letters, a compelling case must also be made for expedited handling.