Influence of Doping Engineering in 1 μm Drift Layer Quasi‐Vertical Fin Field‐Effect Transistor for Achieving >139 V Breakdown Voltage

Abstract

A quasi‐vertical gallium nitride (GaN) fin field effect transistor (FinFET) is designed and analyzed to assess the performance of electrical parameters. The device is deployed on a silicon carbide (SiC) substrate and analyzed using technology computer‐aided design (TCAD). The donor concentration in the critical regions is identified as a significant limiting factor for FinFET electrical properties. Hence, the influence of channel and drift layer doping concentrations (Nd) on performance characteristics is investigated in this work. The electrical characteristics such as threshold voltage, ION/IOFF ratio, subthreshold swing (SS), specific ON‐resistance, and breakdown voltage (VBV) are evaluated for various doping profiles. The doping profile with channel and drift layer concentration of 4 × 1015 cm−3 for a 300 nm fin width and 1 μm thick drift layer exhibits normally OFF behavior with a threshold voltage (Vt) of 1.5 V. It also demonstrates a VBV of 139 V. The corresponding doping profile reveals a low SS of 61 mV dec−1, which is comparable to other similar power devices. This demonstrates the significant potential of the device for medium‐power switching applications.