A new strategy for fabricating a stacked flexible capacitive sensor

Abstract

Currently, flexible capacitive sensors have a wide range of application scenarios in the field of wearable electronic devices. In order to detect more subtle joint movements of the human body, a method of fabricating stacked capacitive sensors is demonstrated. An ultrathin dielectric elastomer film of about 110 μm by the “secondary calendering” method was prepared. The shape of the electrode layers was designed, printed the electrode materials on the dielectric elastomer film by screen-printing, realized the stacked-layer technology, and connected each sensor unit in parallel by the electrode columns formed inside. A 12-layer flexible capacitive sensor with an initial capacitance of 10.2nF, good resolution (1% strain), high sensitivity (1.09) and stability under 10,000 cycles is fabricated. The sensor fabricated in this paper can recognize the motion at various joints of the human body, such as elbow and knee joints. This paper provides a new method for fabrication of stacked flexible capacitive sensors, which opens up new applications in flexible sensors, wearable electronic devices and human-computer interaction.