Chae Sun Kim, Hae Rang Roh, Yongseok Lee, Taekyoon Park, Chanmin Lee, Jong Min Lee
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期刊介绍：
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.
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