{"title":"Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor","authors":"Yuxi Wang;Mingye Du;Jiawei Li;Daozheng Luo;Tao Wu","doi":"10.1109/TMAG.2024.3432158","DOIUrl":null,"url":null,"abstract":"Miniaturized piezoelectric/magnetostrictive resonators have been proven to be effective magnetometers with the \n<inline-formula> <tex-math>$\\Delta $ </tex-math></inline-formula>\nE effect. Here, we reported the magnetic field angle-sensitive behavior of compact piezoelectric/magnetostrictive Lamb mode resonators. Utilizing magneto-optic Kerr effect (MOKE) microscopy, we observed magnetic domain reversals over in-plane angles from 0° to 90°. This revealed shifts in remnant magnetizations and coercive fields of the device in response to the external magnetic field. Additionally, we analyzed the angle dependence of frequency shift on the external magnetic field directions. The largest shift was approximately 90 kHz at 90°. As the angle decreased, frequency shifts gradually reduced, approaching the minimal at 0°. The MEMS resonant sensor reached the highest sensitivity of 25 Hz/\n<inline-formula> <tex-math>$\\mu $ </tex-math></inline-formula>\nT when the magnetic field was along at 90°.","PeriodicalId":13405,"journal":{"name":"IEEE Transactions on Magnetics","volume":null,"pages":null},"PeriodicalIF":2.1000,"publicationDate":"2024-07-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Magnetics","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10606245/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Miniaturized piezoelectric/magnetostrictive resonators have been proven to be effective magnetometers with the
$\Delta $
E effect. Here, we reported the magnetic field angle-sensitive behavior of compact piezoelectric/magnetostrictive Lamb mode resonators. Utilizing magneto-optic Kerr effect (MOKE) microscopy, we observed magnetic domain reversals over in-plane angles from 0° to 90°. This revealed shifts in remnant magnetizations and coercive fields of the device in response to the external magnetic field. Additionally, we analyzed the angle dependence of frequency shift on the external magnetic field directions. The largest shift was approximately 90 kHz at 90°. As the angle decreased, frequency shifts gradually reduced, approaching the minimal at 0°. The MEMS resonant sensor reached the highest sensitivity of 25 Hz/
$\mu $
T when the magnetic field was along at 90°.
期刊介绍：
Science and technology related to the basic physics and engineering of magnetism, magnetic materials, applied magnetics, magnetic devices, and magnetic data storage. The IEEE Transactions on Magnetics publishes scholarly articles of archival value as well as tutorial expositions and critical reviews of classical subjects and topics of current interest.
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