Water-assisted purification during electron beam-induced deposition of platinum and gold.

IF 2.6 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Beilstein Journal of Nanotechnology Pub Date : 2024-07-18 eCollection Date: 2024-01-01 DOI:10.3762/bjnano.15.73
Cristiano Glessi, Fabian A Polman, Cornelis W Hagen
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Abstract

Direct fabrication of pure metallic nanostructures is one of the main aims of focused electron beam-induced deposition (FEBID). It was recently achieved for gold deposits by the co-injection of a water precursor and the gold precursor Au(tfac)Me2. In this work results are reported, using the same approach, on a different gold precursor, Au(acac)Me2, as well as the frequently used platinum precursor MeCpPtMe3. As a water precursor MgSO4·7H2O was used. The purification during deposition led to a decrease of the carbon-to-gold ratio (in atom %) from 2.8 to 0.5 and a decrease of the carbon-to-platinum ratio (in atom %) from 6-7 to 0.2. The purification was done in a regular scanning electron microscope using commercially available components and chemicals, which paves the way for a broader application of direct etching-assisted FEBID to obtain pure metallic structures.

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电子束诱导铂和金沉积过程中的水辅助净化。
直接制造纯金属纳米结构是聚焦电子束诱导沉积(FEBID)的主要目标之一。最近,通过水前驱体和金前驱体 Au(tfac)Me2 的共同注入,实现了金沉积。本研究采用相同的方法,对不同的金前驱体 Au(acac)Me2 和常用的铂前驱体 MeCpPtMe3 进行了研究。水前驱体使用的是 MgSO4-7H2O。沉积过程中的提纯使得碳金比(原子百分比)从 2.8 降至 0.5,碳铂比(原子百分比)从 6-7 降至 0.2。纯化是在普通扫描电子显微镜下使用市场上可买到的元件和化学品完成的,这为更广泛地应用直接蚀刻辅助 FEBID 获得纯金属结构铺平了道路。
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来源期刊
Beilstein Journal of Nanotechnology
Beilstein Journal of Nanotechnology NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.70
自引率
3.20%
发文量
109
审稿时长
2 months
期刊介绍: The Beilstein Journal of Nanotechnology is an international, peer-reviewed, Open Access journal. It provides a unique platform for rapid publication without any charges (free for author and reader) – Platinum Open Access. The content is freely accessible 365 days a year to any user worldwide. Articles are available online immediately upon publication and are publicly archived in all major repositories. In addition, it provides a platform for publishing thematic issues (theme-based collections of articles) on topical issues in nanoscience and nanotechnology. The journal is published and completely funded by the Beilstein-Institut, a non-profit foundation located in Frankfurt am Main, Germany. The editor-in-chief is Professor Thomas Schimmel – Karlsruhe Institute of Technology. He is supported by more than 20 associate editors who are responsible for a particular subject area within the scope of the journal.
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