Chinmay Yadav, S Srinivasulu Raju, Sujan Yenuganti
{"title":"A Tri-axial Resonating Beam MEMS Accelerometer","authors":"Chinmay Yadav, S Srinivasulu Raju, Sujan Yenuganti","doi":"10.1007/s42835-024-01984-8","DOIUrl":null,"url":null,"abstract":"<p>MEMS-based devices have helped in the miniaturization of various transducers, one such being the accelerometer. The current study presents the design and simulation of a MEMS tri-axial resonance-based accelerometer in a differential arrangement to measure acceleration up to 5 g. The final tri-axial accelerometer differential design is derived from five designs which consist of four proof masses, four resonating beams, two vertical and two horizontal hinges. The first three designs are non-differential designs and the next two designs give a differential output only for out-of-plane acceleration. Numerical simulations were carried out in COMSOL Multiphysics for all the designs and the dimensions were optimized to obtain maximum stress on the resonating beam for an applied acceleration. Eigenfrequency analysis was also carried out to estimate the change in resonance frequencies of all the resonating beams in each of the proposed models along with the final differential design. The sensitivities were found to be 33 Hz/g, 33 Hz/g, and 19 Hz/g for the final differential design in X, Y, and Z directions respectively. The differential arrangement will be able to compensate for any temperature variations and the resonance condition can be achieved by piezoelectric excitation and detection.</p>","PeriodicalId":15577,"journal":{"name":"Journal of Electrical Engineering & Technology","volume":null,"pages":null},"PeriodicalIF":1.6000,"publicationDate":"2024-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Electrical Engineering & Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1007/s42835-024-01984-8","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
MEMS-based devices have helped in the miniaturization of various transducers, one such being the accelerometer. The current study presents the design and simulation of a MEMS tri-axial resonance-based accelerometer in a differential arrangement to measure acceleration up to 5 g. The final tri-axial accelerometer differential design is derived from five designs which consist of four proof masses, four resonating beams, two vertical and two horizontal hinges. The first three designs are non-differential designs and the next two designs give a differential output only for out-of-plane acceleration. Numerical simulations were carried out in COMSOL Multiphysics for all the designs and the dimensions were optimized to obtain maximum stress on the resonating beam for an applied acceleration. Eigenfrequency analysis was also carried out to estimate the change in resonance frequencies of all the resonating beams in each of the proposed models along with the final differential design. The sensitivities were found to be 33 Hz/g, 33 Hz/g, and 19 Hz/g for the final differential design in X, Y, and Z directions respectively. The differential arrangement will be able to compensate for any temperature variations and the resonance condition can be achieved by piezoelectric excitation and detection.
期刊介绍:
ournal of Electrical Engineering and Technology (JEET), which is the official publication of the Korean Institute of Electrical Engineers (KIEE) being published bimonthly, released the first issue in March 2006.The journal is open to submission from scholars and experts in the wide areas of electrical engineering technologies.
The scope of the journal includes all issues in the field of Electrical Engineering and Technology. Included are techniques for electrical power engineering, electrical machinery and energy conversion systems, electrophysics and applications, information and controls.