A Tri-axial Resonating Beam MEMS Accelerometer

IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Electrical Engineering & Technology Pub Date : 2024-07-30 DOI:10.1007/s42835-024-01984-8
Chinmay Yadav, S Srinivasulu Raju, Sujan Yenuganti
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Abstract

MEMS-based devices have helped in the miniaturization of various transducers, one such being the accelerometer. The current study presents the design and simulation of a MEMS tri-axial resonance-based accelerometer in a differential arrangement to measure acceleration up to 5 g. The final tri-axial accelerometer differential design is derived from five designs which consist of four proof masses, four resonating beams, two vertical and two horizontal hinges. The first three designs are non-differential designs and the next two designs give a differential output only for out-of-plane acceleration. Numerical simulations were carried out in COMSOL Multiphysics for all the designs and the dimensions were optimized to obtain maximum stress on the resonating beam for an applied acceleration. Eigenfrequency analysis was also carried out to estimate the change in resonance frequencies of all the resonating beams in each of the proposed models along with the final differential design. The sensitivities were found to be 33 Hz/g, 33 Hz/g, and 19 Hz/g for the final differential design in X, Y, and Z directions respectively. The differential arrangement will be able to compensate for any temperature variations and the resonance condition can be achieved by piezoelectric excitation and detection.

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三轴谐振梁 MEMS 加速计
基于微机电系统的设备有助于实现各种传感器的微型化,加速度计就是其中之一。本研究介绍了基于微机电系统三轴共振的加速度计的设计和仿真,该加速度计采用差分布置,可测量高达 5 g 的加速度。最终的三轴加速度计差分设计来自五种设计,包括四个验证质量块、四个共振梁、两个垂直铰链和两个水平铰链。前三种设计为非差分设计,后两种设计仅对平面外加速度提供差分输出。在 COMSOL Multiphysics 中对所有设计进行了数值模拟,并对尺寸进行了优化,以便在施加加速度时获得共振梁上的最大应力。此外,还进行了特征频率分析,以估算每个拟议模型中所有共振梁的共振频率变化以及最终的差分设计。结果发现,最终差分设计在 X、Y 和 Z 方向的灵敏度分别为 33 Hz/g、33 Hz/g 和 19 Hz/g。差分布置能够补偿任何温度变化,并可通过压电激励和检测实现共振条件。
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来源期刊
Journal of Electrical Engineering & Technology
Journal of Electrical Engineering & Technology ENGINEERING, ELECTRICAL & ELECTRONIC-
CiteScore
4.00
自引率
15.80%
发文量
321
审稿时长
3.8 months
期刊介绍: ournal of Electrical Engineering and Technology (JEET), which is the official publication of the Korean Institute of Electrical Engineers (KIEE) being published bimonthly, released the first issue in March 2006.The journal is open to submission from scholars and experts in the wide areas of electrical engineering technologies. The scope of the journal includes all issues in the field of Electrical Engineering and Technology. Included are techniques for electrical power engineering, electrical machinery and energy conversion systems, electrophysics and applications, information and controls.
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