Step-Recovery With Multi-Pulse Test (SRMPT) Characterization Technique for the Understanding of Border Traps in Ferroelectric Capacitors

Abstract

A simple technique, the Step-recovery with Multi-pulse Test (SRMPT), is proposed to obtain extensive information on the density and energy distribution of the border traps near the ferroelectric/electrode interface in ferroelectric devices. For demonstration purpose, the approach is adopted to explore the impact of electrode materials on ferroelectric capacitors (FeCAPs). Our results indicate that TiN electrodes induce a broader distribution of border traps in energy level as well as a significantly higher trap density, compared with W electrodes. A comparative analysis with ab-initio theoretical calculation suggests that these border traps originate from the oxygen vacancies. The simple approach not only provides quantitative information on the border trap but also serves as a potent tool for material selection and device optimization.