Enhanced growth rates of N-type phosphorus-doped polycrystalline diamond via in-liquid microwave plasma CVD

IF 3.4 3区 化学 Q2 CHEMISTRY, INORGANIC & NUCLEAR Solid State Sciences Pub Date : 2024-08-03 DOI:10.1016/j.solidstatesciences.2024.107650
Yusuke Tominaga , Akihiro Uchida , Yuvaraj M. Hunge , Isao Shitanda , Masayuki Itagaki , Takeshi Kondo , Makoto Yuasa , Hiroshi Uestuska , Chiaki Terashima
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Abstract

Phosphorus-doped diamond (PDD) exhibits excellent properties, making it suitable for a wide range of applications, such as electronic devices and electrodes. Here, we report the first synthesis of PDD by in-liquid microwave plasma CVD (IL-MPCVD) under high-pressure and low-power conditions. A mixture of methanol (MeOH) and ethanol (EtOH) with triethyl phosphate ((C2H5)3PO4) and (P/C = 1000 ppm) was used for the PDD deposition. Samples were characterized by laser microscopy, Raman spectroscopy, and glow discharge optical emission spectroscopy. Notably, PDD was successfully produced at a growth rate of 280 μm/h, which is two orders of magnitude higher than conventional CVD methods. Additionally, cyclic voltammetry (CV) and impedance spectroscopy (EIS) were used to evaluate the electrochemical properties of PDD. As a result, we confirmed the wide potential window characteristic of conductive diamond and determined that the donor density was [P] = 3.8 × 1017cm⁻³. Therefore, it is clear that IL-MPCVD is applicable for very high growth rates in the CVD process for PDD synthesis.

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通过液内微波等离子体化学气相沉积提高 N 型掺磷多晶金刚石的生长率
掺磷金刚石(PDD)具有优异的性能,因此可广泛应用于电子设备和电极等领域。在此,我们首次报道了在高压和低功率条件下通过液内微波等离子体化学气相沉积(IL-MPCVD)合成 PDD 的过程。PDD 沉积使用了甲醇(MeOH)和乙醇(EtOH)与磷酸三乙酯((CH)PO)和(P/C = 1000 ppm)的混合物。通过激光显微镜、拉曼光谱和辉光放电光发射光谱对样品进行了表征。值得注意的是,PDD 以 280 μm/h 的生长速度成功制备,比传统的 CVD 方法高出两个数量级。此外,我们还利用循环伏安法(CV)和阻抗光谱法(EIS)评估了 PDD 的电化学特性。结果,我们证实了导电金刚石的宽电位窗口特性,并确定了供体密度为 [P] = 3.8 × 10cm-³。因此,IL-MPCVD 显然适用于在 CVD 工艺中以极高的生长率合成 PDD。
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来源期刊
Solid State Sciences
Solid State Sciences 化学-无机化学与核化学
CiteScore
6.60
自引率
2.90%
发文量
214
审稿时长
27 days
期刊介绍: Solid State Sciences is the journal for researchers from the broad solid state chemistry and physics community. It publishes key articles on all aspects of solid state synthesis, structure-property relationships, theory and functionalities, in relation with experiments. Key topics for stand-alone papers and special issues: -Novel ways of synthesis, inorganic functional materials, including porous and glassy materials, hybrid organic-inorganic compounds and nanomaterials -Physical properties, emphasizing but not limited to the electrical, magnetical and optical features -Materials related to information technology and energy and environmental sciences. The journal publishes feature articles from experts in the field upon invitation. Solid State Sciences - your gateway to energy-related materials.
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