Precursor-Derived Sensing Interdigitated Electrode Microstructures Based on Platinum and Nano Porous Carbon

Abstract

Interdigital electrodes were prepared using nanoimprint lithography and piezoelectric inkjet printing. These processes are simpler and more cost-effective than the industrially used electron beam lithography because of their purely mechanical process step. For the investigation of material dependence, platinum as well as carbon electrodes were fabricated. Afterwards electrodes with various line widths and spacings were tested for the application as a chemiresistive sensor for ferrocenyl-methanol and the influence of the gap-width and conductor cross-section on the sensitivity was investigated. The general suitability of the systems for the production of such structures could be confirmed. Structures with a limit of detection (LOD) down to 1.2 μM and 35.9 μM could be produced for carbon and platinum, respectively, as well as a response time of 3.6 s was achieved.