A comparative study on the electrical properties of Ba0.6Sr0.4TiO3 film capacitors with different top electrodes

IF 2.4 4区物理与天体物理 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Current Applied Physics Pub Date : 2024-08-29 DOI:10.1016/j.cap.2024.08.013

Xiangui Zhang , Xiaoyu Fan , Siyu Ji , Yilin Cao , Jianmin Song , Gang Li , Baoting Liu , Xiaohong Li , Xiangyi Zhang

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Abstract

Au/Ba_0.6Sr_0.4TiO₃ (BST)/La_0.5Sr_0.5CoO₃ (LSCO) and Pt/BST/LSCO ferroelectric capacitors were successfully constructed on (001) LaAlO₃ substrates via off-axis magnetron sputtering. X-ray diffraction (XRD) and Phi scan patterns confirmed that the BST film was epitaxial with an out-of-plane tetragonal phase. The ferroelectric and dielectric measurements reveal that, compared with the Pt/BST/LSCO capacitor, the Au/BST/LSCO capacitor exhibits a larger coercive field (∼139.7 kV/cm), smaller permanent polarization (∼2.94 $μ C / {c m}^{2}$ ), and lower tunability (∼65.22 %), which may be attributed to the higher difference in work function and weaker depolarization field screen effect of the top electrode, as well as smaller interfacial capacitance of the Au/BST interface than those of the Pt/BST interface. Therefore, based on series capacitor model and leakage behavior analysis, the thickness and dielectric constant of interfacial layer are quantitatively determined to be 3.52 nm and 12.13 for Pt/BST, and 4.42 nm and 5.82 for Au/BST, respectively. Our results pave a way for improving the dielectric performance in electrically tunable microwave devices.

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采用不同顶电极的 Ba0.6Sr0.4TiO3 薄膜电容器电气性能比较研究

通过离轴磁控溅射，在 (001) LaAlO3 基底上成功构建了金/Ba0.6Sr0.4TiO3（BST）/La0.5Sr0.5CoO3（LSCO）和 Pt/BST/LSCO 铁电电容器。X 射线衍射 (XRD) 和 Phi 扫描图证实，BST 薄膜是具有面外四方相的外延薄膜。铁电和介电测量结果表明，与 Pt/BST/LSCO 电容器相比，Au/BST/LSCO 电容器表现出更大的矫顽力场（∼139.7 kV/cm）、更小的永久极化（∼2.94 μC/cm2）和更低的可调谐性（∼65.22 %），这可能是由于顶部电极的功函数差异较大，去极化场屏蔽效应较弱，以及 Au/BST 界面的界面电容小于 Pt/BST 界面的界面电容。因此，根据串联电容器模型和漏电行为分析，定量确定了 Pt/BST 和 Au/BST 的界面层厚度和介电常数分别为 3.52 nm 和 12.13，以及 4.42 nm 和 5.82。我们的研究结果为改善电可调微波器件的介电性能铺平了道路。

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来源期刊

Current Applied Physics 物理-材料科学：综合

CiteScore

4.80

自引率

0.00%

发文量

213

审稿时长

33 days

期刊介绍： Current Applied Physics (Curr. Appl. Phys.) is a monthly published international journal covering all the fields of applied science investigating the physics of the advanced materials for future applications. Other areas covered: Experimental and theoretical aspects of advanced materials and devices dealing with synthesis or structural chemistry, physical and electronic properties, photonics, engineering applications, and uniquely pertinent measurement or analytical techniques. Current Applied Physics, published since 2001, covers physics, chemistry and materials science, including bio-materials, with their engineering aspects. It is a truly interdisciplinary journal opening a forum for scientists of all related fields, a unique point of the journal discriminating it from other worldwide and/or Pacific Rim applied physics journals. Regular research papers, letters and review articles with contents meeting the scope of the journal will be considered for publication after peer review. The Journal is owned by the Korean Physical Society.