Bulk acoustic wave resonators for sensing applications: A review

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Sensors and Actuators A-physical Pub Date : 2024-09-04 DOI:10.1016/j.sna.2024.115839

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Abstract

With the emergence of new sensing technologies, there is upcoming demand of high performance, small size and power efficient electronic sensors. Next-generation electronic sensor technology will be more advanced, miniaturized and power efficient. There are variety of sensing and transduction technologies label as piezoresistive, piezoelectric, capacitive, thermoelectric, magnetic and acoustic wave-based principles. Each technology has associated merits and drawbacks. Bulk acoustic wave (BAW) resonator-based sensor show the benchmarking performance which is not possible by any other competing sensing technology. It is perceived that BAW resonator-based sensor provide high sensitivity and selectivity. Therefore, there is huge demand of high frequency operating bulk acoustic wave resonators based electronic sensors. High frequency device operation is limited by many factors such as piezoelectric material layer quality, acoustic wave losses, film thickness and device area became very small in the sub-6 GHz regime. Electronic sensors are ubiquitous and seems to be an economy engine and largest growing segment in the electronic devices and sensor segment. Here, we review, the state-of-the-art development and recent breakthroughs in bulk acoustic wave resonators highlighting the major ongoing research. The review describes various piezo-electric materials property and various bulk acoustic wave resonators in detail. Some promising applications capitalizing the sensing techniques along with the characteristics and performance of bulk acoustic wave devices are also explained in the context of recent development. The prime objective of this review is to provide an up-to-date scientific framework related to this niche emerging research area. The survey reveals the potential of bulk acoustic wave resonators for different sensing applications while several critical challenges have to be still overcome. Finally, insights are represented and future perspectives of bulk acoustic wave resonators along with their structures are discussed.

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用于传感应用的体声波谐振器：综述

随着新传感技术的出现，对高性能、小尺寸和高能效电子传感器的需求日益增长。下一代电子传感器技术将更加先进、微型化和高能效。传感和传导技术种类繁多，包括压阻、压电、电容、热电、磁性和基于声波原理的传感和传导技术。每种技术都有相关的优点和缺点。基于体声波（BAW）谐振器的传感器具有其他任何竞争传感技术无法达到的基准性能。人们认为，基于声波谐振器的传感器具有高灵敏度和高选择性。因此，对高频工作的基于体声波谐振器的电子传感器有着巨大的需求。高频器件的运行受到许多因素的限制，如压电材料层的质量、声波损耗、薄膜厚度以及在 6 GHz 以下频率时器件面积变得非常小。电子传感器无处不在，似乎已成为电子设备和传感器领域的经济引擎和增长最快的细分市场。在此，我们回顾了体声波谐振器的最新发展和突破，重点介绍了正在进行的主要研究。综述详细介绍了各种压电材料的特性和各种体声波谐振器。此外，还结合最近的发展情况，解释了利用传感技术的一些有前途的应用，以及体声波器件的特性和性能。本综述的主要目的是提供与这一新兴研究领域相关的最新科学框架。调查揭示了体声波谐振器在不同传感应用中的潜力，同时也指出了仍需克服的几个关键挑战。最后，还讨论了对体声波谐振器及其结构的见解和未来展望。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...