Sensors and Actuators A-physical最新文献

A piezoelectric hybrid-driven manufacturing system for processing micro indentation arrays to regulate the optical reflection characteristics of metal surfaces 一种用于加工微压痕阵列以调节金属表面光学反射特性的压电混合驱动制造系统

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-05-01 Epub Date: 2026-02-14 DOI: 10.1016/j.sna.2026.117599

Xin Yang, Zaizhen Lou, Bosen Jia, Yongda Yan, Yanquan Geng

Nanoindentation-based manufacturing has been widely used for the fabrication of complex microstructural arrays, but its application has been constrained by limited processing ranges and unstable indentation depths. In this study, we develop a nanoindentation-based piezoelectric manufacturing system (PMS) to overcome these limitations. The PMS combines a piezoelectric driven two-dimensional micro-positioning stage (2D-MPS) with an indentation manufacturing module (IMM) to achieve a processing range of 30 mm × 30 mm and a maximum indentation depth of 9.25 μm for manufacturing micro indentation arrays. The 2D-MPS integrates laser displacement feedback for large-area, high-precision positioning. The processing strategy of force control takes the normal force of the indentation process as feedback, ensuring that the depth of multiple indentations is uniform over a large range, achieving the manufacturing of transverse (macroscopic to microscopic) planar micro indentation. The machining performance of the PMS under displacement-feedback and force-control modes was systematically characterized. Experimental results show that the system attains a positioning error below 2 % and a depth deviation of less than 200 nm. Furthermore, a pyramid-shaped micro-indentation array with an area of 2 mm × 2 mm was successfully fabricated on an aluminum alloy surface, and its ability to modulate optical reflection characteristics was experimentally verified. These results demonstrate that the proposed PMS provides a promising approach for the fabrication of planar micro-indentation structures with large depths and wide processing areas.

纳米压痕技术已广泛应用于复杂微结构阵列的制造，但其应用受到加工范围有限和压痕深度不稳定的限制。在这项研究中，我们开发了一种基于纳米压痕的压电制造系统（PMS）来克服这些限制。PMS结合了压电驱动的二维微定位平台（2D-MPS）和压痕制造模块（IMM），可实现30 mm × 30 mm的加工范围和9.25 μm的最大压痕深度，用于制造微压痕阵列。2D-MPS集成了激光位移反馈，用于大面积、高精度定位。力控制的加工策略以压痕过程的法向力为反馈，保证多个压痕深度在大范围内均匀，实现横向（宏观到微观）平面微压痕的制造。系统地描述了位移反馈和力控制两种模式下永磁同步系统的加工性能。实验结果表明，该系统的定位误差小于2 %，深度偏差小于200 nm。此外，在铝合金表面成功制备了面积为2 mm × 2 mm的金字塔型微压孔阵列，并通过实验验证了其对光反射特性的调制能力。这些结果表明，所提出的PMS为制造具有大深度和宽加工区域的平面微压痕结构提供了一种有前途的方法。

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引用次数: 0

Short-range solid-liquid triboelectric nanogenerator for mechanical energy harvesting and traffic sensing 用于机械能量收集和交通传感的短程固液摩擦电纳米发电机

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-16 Epub Date: 2026-02-06 DOI: 10.1016/j.sna.2026.117570

Changzheng Li , Ziyuan Liang , Xuyang Liu , Fuyuan He , Ruishi Gan

Intelligent Transportation Systems (ITS) are significant to the development of society, yet distributed sensor networks are highly dependent on the traditional wired power supply mode. This leads to complex power supply wiring and complicated maintenance. Self-powered sensors based on solid-solid triboelectric nanogenerator (TENG) are of interest, but their durability is limited by material wear. Herein, we proposed a short-range solid-liquid triboelectric nanogenerator (S-TENG) for harvesting mechanical energy and enabling self-powered sensing in the traffic environment. When liquid within a polytetrafluoroethylene (PTFE) tube is subjected to short-range compression by a piston, the S-TENG outputs electricity based on contact electrification and electrostatic effect. The S-TENG can generate an output voltage of 4.1 V in energy harvesting and demonstrates a rapid response time of 0.3 s in sensing applications. Meanwhile, the effects of different critical parameters on output characteristics of the S-TENG were measured, including liquid rise height, electrode width, working medium concentration, tube wall thickness and actuation frequency. Finally, an application scenario based on S-TENG is proposed to harvest mechanical energy and real-time monitor vehicle motion. This work provides a new path for mechanical energy harvesting and self-powered sensing in the field of intelligent transport.

智能交通系统（ITS）对社会发展具有重要意义，但分布式传感器网络高度依赖传统的有线供电方式。这导致电源布线复杂，维护复杂。基于固体-固体摩擦电纳米发电机（TENG）的自供电传感器引起了人们的兴趣，但其耐久性受到材料磨损的限制。在此，我们提出了一种短程固体-液体摩擦电纳米发电机（S-TENG），用于收集机械能并在交通环境中实现自供电传感。当聚四氟乙烯（PTFE）管内的液体受到活塞的短距离压缩时，S-TENG根据接触通电和静电效应输出电力。s - teng在能量收集中可以产生4.1 V的输出电压，在传感应用中显示出0.3 s的快速响应时间。同时，测试了液升高度、电极宽度、工质浓度、管壁厚度和驱动频率等关键参数对S-TENG输出特性的影响。最后，提出了基于S-TENG的机械能量采集和车辆运动实时监控的应用场景。本工作为智能交通领域的机械能收集和自供电传感提供了一条新的途径。

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引用次数: 0

Fluid dynamic optimization of the gas chamber in an NDIR CO2 sensor by flow visualization experiment and CFD simulation 基于流动可视化实验和CFD模拟的NDIR型CO2传感器气体室流体动力学优化

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-16 Epub Date: 2026-01-30 DOI: 10.1016/j.sna.2026.117526

Le Zhao , Xi Chen , Xuejiao Liu

Optical path underutilization resulting from flow nonuniformity in gas chamber often limits the response speed and measurement accuracy of non-dispersive infrared (NDIR) CO₂ sensors. In this study, we focused on a typical cylindrical gas chamber and designed a simple transparent deflector to optimize the flow field through combined flow visualization experiments and CFD simulations. By redirecting the gas flow and suppressing the large-scale vortex formation, the right-trapezoidal deflector equipped at the inlet region effectively improved both gas diffusion speed and uniformity. As a result, the CO₂ concentration in previously underutilized "dead volume" near the inlet increased to a level close to that of the supplied standard gas. The effectiveness of this deflector-based optimization in enhancing CO₂-IR interaction was experimentally confirmed by comparing the responses of two NDIR CO₂ sensors with and without the deflector. This improvement was particularly pronounced for gas mixtures with lower CO₂ concentrations and higher flow velocities, achieving an approximately 15 % reduction in response time. These findings provide a novel strategy for enhancing the performance and optimizing the structure of NDIR sensors.

气体室内流动不均匀性导致光路利用率不足，限制了非色散红外（NDIR） CO2传感器的响应速度和测量精度。本研究以典型的圆柱形毒气室为研究对象，通过流动可视化实验和CFD模拟相结合的方法，设计了一种简单的透明导流板来优化流场。安装在入口区域的右梯形导流板通过改变气流方向和抑制大规模涡的形成，有效地提高了气体扩散速度和均匀性。结果，在入口附近以前未充分利用的“死体积”中的二氧化碳浓度增加到接近供应标准气体的水平。通过比较两个NDIR CO2传感器在有和没有偏转板的情况下的响应，实验证实了这种基于偏转板的优化在增强CO2- ir相互作用方面的有效性。对于二氧化碳浓度较低、流速较高的混合气体，这种改进尤为明显，响应时间减少了约15% %。这些发现为提高NDIR传感器的性能和优化结构提供了一种新的策略。

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引用次数: 0

Thermal stability and high-power performance of KNN-based lead-free piezoceramic lightweight ring transducer 基于knn的无铅压电陶瓷轻质环形换能器的热稳定性和高功率性能

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-16 Epub Date: 2026-02-05 DOI: 10.1016/j.sna.2026.117572

Xiongchao Ma , Xianglong Yu , Hongjie Zhang , Mingyu Zhang , Lianzhi Tang , Qichao Li , Zhengjun Liu , Yiping Guo

The unmanned development of current marine equipment necessitates that onboard acoustic devices evolve toward high performance and lightweight design. The weight reduction of high-power underwater acoustic transducers is hindered by the limited power capacity of active materials and the requirement for high-power operational stability. Lead-free potassium sodium niobate (KNN, ((K, Na) NbO₃)) piezoceramics offer a promising alternative to lead zirconate titanate (PZT, (Pb (ZrTiO₃)) due to their environmental friendliness and lower density, which is conducive to lightweight design. However, their application in high-power transducers has been limited by concerns over inferior thermal stability. This work addresses this challenge by designing and fabricating a lightweight segmented ring transducer using KNN-based ceramics and systematically evaluating its high-power electroacoustic performance and thermal characteristics. Finite element simulations and experimental results demonstrate that the KNN-based transducer achieves a substantial 37.8 % weight reduction compared to its PZT counterpart while delivering comparable transmitting voltage response and electroacoustic efficiency (67 %-75 %). Crucially, the KNN-based transducer exhibits superior thermal management, evidenced by a lower temperature rise per unit electric power. Furthermore, the KNN-based transducer demonstrates robust operational stability under continuous high-power excitation (mass-specific power density attains 1578.05 W/kg) for extended durations, with no significant performance degradation. Our findings validate KNN-based lead-free piezoceramics as a viable active material for lightweight, high-power underwater acoustic transducers, offering an environmentally friendly solution for lightweight high performance underwater transducer design.

当前船舶设备的无人化发展要求机载声学设备向高性能、轻量化方向发展。大功率水声换能器的减重受到活性材料功率容量的限制和大功率工作稳定性的要求的制约。无铅铌酸钾钠（KNN, (K, Na) NbO3）)压电陶瓷具有环保、低密度、轻量化设计等优点，是钛酸锆铅(PZT, （Pb (ZrTiO3)）的理想替代品。然而，它们在高功率换能器中的应用受到热稳定性问题的限制。本研究通过设计和制造基于knn陶瓷的轻质分段环形换能器，并系统评估其大功率电声性能和热特性，解决了这一挑战。有限元模拟和实验结果表明，与PZT相比，基于knn的换能器实现了37.8 %的重量减轻，同时提供了相当的发射电压响应和电声效率（67 %-75 %）。至关重要的是，基于knn的换能器表现出卓越的热管理，每单位电力的温升较低。此外，基于knn的换能器在持续高功率激励（质量比功率密度达到1578.05 W/kg）下长时间表现出强大的工作稳定性，没有明显的性能下降。我们的研究结果验证了knn基无铅压电陶瓷作为轻质、大功率水声换能器的可行活性材料，为轻质高性能水下换能器设计提供了一种环保的解决方案。

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引用次数: 0

Wireless at 2.45 GHz based on AlN/Sapphire and operable up to 600 °C 无线频率为2.45 GHz，基于AlN/Sapphire，工作温度可达600°C

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-16 Epub Date: 2026-02-10 DOI: 10.1016/j.sna.2026.117569

Ulrich Youbi , Sami Hage-Ali , Florian Bartoli , Jaafar Ghanbaja , Eric Frayssinet , Benjamin Damilano , Pierre-Marie Coulon , Demba Ba , Hamid M’Jahed , Michel Vilasi , Thierry Aubert , Maxime Hugues , Omar Elmazria

This study reports significant progress in the field of high temperature wireless surface acoustic wave (SAW) sensors in the 2.45 GHz ISM band, using AlN/Sapphire based resonators. AlN thin films with a thickness of 0.6 µm, synthesized on (0001) sapphire substrates by Metal Organic Chemical Vapor Deposition (MOCVD), demonstrated high crystalline quality and nanometric surface roughness, essential properties for SAW applications. Initially, SAW devices operating in the 2.45 GHz ISM band were tested up to 500°C in both wired and wireless configurations using aluminium electrodes. Wireless interrogation was carried out successfully at a distance of 3 m up to 500°C, with a temperature coefficient of frequency (TCF) measured at −58 ppm/°C. Critically, when the NiAl alloy was used for the thin film electrodes, the operating temperature was extended to 600°C while maintaining a TCF of −43 ppm/°C and stable wireless performance at 3 m, with potential up to 10 m. These results exceed the state-of-the-art for high temperature SAW sensors in the wide 2.45 GHz ISM band. A long-duration annealing test has confirmed the self-passivation properties of the NiAl electrodes and the robustness of the NiAl/AlN/Sapphire structure, with a minimal degradation after 176 h at 500°C, thus demonstrating its potential for long term use in extreme environments.

本研究报告了在2.45 GHz ISM频段使用基于AlN/蓝宝石谐振器的高温无线表面声波（SAW）传感器领域取得的重大进展。通过金属有机化学气相沉积（MOCVD）在（0001）蓝宝石衬底上合成了厚度为0.6 µm的AlN薄膜，具有高晶体质量和纳米级表面粗糙度，这是SAW应用的基本特性。最初，工作在2.45 GHz ISM频段的SAW设备在有线和无线配置下使用铝电极进行了高达500°C的测试。无线探测在距离3 m至500°C范围内成功进行，测得频率温度系数（TCF）为- 58 ppm/°C。关键的是，当NiAl合金用于薄膜电极时，工作温度扩展到600°C，同时保持- 43 ppm/°C的TCF和3 m时稳定的无线性能，电势高达10 m。这些结果超过了最先进的高温SAW传感器在宽2.45 GHz ISM频段。一项长时间的退火测试证实了NiAl电极的自钝化性能和NiAl/AlN/蓝宝石结构的鲁棒性，在500°C下176 h后降解最小，从而证明了其在极端环境下长期使用的潜力。

{"title":"Wireless at 2.45 GHz based on AlN/Sapphire and operable up to 600 °C","authors":"Ulrich Youbi , Sami Hage-Ali , Florian Bartoli , Jaafar Ghanbaja , Eric Frayssinet , Benjamin Damilano , Pierre-Marie Coulon , Demba Ba , Hamid M’Jahed , Michel Vilasi , Thierry Aubert , Maxime Hugues , Omar Elmazria","doi":"10.1016/j.sna.2026.117569","DOIUrl":"10.1016/j.sna.2026.117569","url":null,"abstract":"<div><div>This study reports significant progress in the field of high temperature wireless surface acoustic wave (SAW) sensors in the 2.45 GHz ISM band, using AlN/Sapphire based resonators. AlN thin films with a thickness of 0.6 µm, synthesized on (0001) sapphire substrates by Metal Organic Chemical Vapor Deposition (MOCVD), demonstrated high crystalline quality and nanometric surface roughness, essential properties for SAW applications. Initially, SAW devices operating in the 2.45 GHz ISM band were tested up to 500°C in both wired and wireless configurations using aluminium electrodes. Wireless interrogation was carried out successfully at a distance of 3 m up to 500°C, with a temperature coefficient of frequency (TCF) measured at −58 ppm/°C. Critically, when the NiAl alloy was used for the thin film electrodes, the operating temperature was extended to 600°C while maintaining a TCF of −43 ppm/°C and stable wireless performance at 3 m, with potential up to 10 m. These results exceed the state-of-the-art for high temperature SAW sensors in the wide 2.45 GHz ISM band. A long-duration annealing test has confirmed the self-passivation properties of the NiAl electrodes and the robustness of the NiAl/AlN/Sapphire structure, with a minimal degradation after 176 h at 500°C, thus demonstrating its potential for long term use in extreme environments.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"401 ","pages":"Article 117569"},"PeriodicalIF":4.9,"publicationDate":"2026-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146192833","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Human internal actuators using bending and twisting deformation of a soft heat storage material driven by ultrasonic heating of shape memory alloy wires 人体内部致动器是利用形状记忆合金丝的超声加热驱动的弯曲和扭转变形的软储热材料

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-16 Epub Date: 2026-02-03 DOI: 10.1016/j.sna.2026.117535

Satomitsu Imai

A soft actuator capable of changing the orientation of a human internal medical device was developed. The actuator in this study consists of shape memory alloy (SMA) wires attached to a short cylindrical polyurethane (PU) gel. The SMA wires are remotely heated by ultrasound. The SMA wires induce bending and torsional deformation of the PU gel. By attaching a medical device to the actuator, the orientation and posture of the device can be changed. The PU gel was 20 mm long and 9 mm in diameter. Heat transferred from the PU gel to the SMA wire (coil, diameter 0.56 mm) causes the SMA wire to contract and expand (bidirectional deformation). This system allows the actuator to be very compact, even capable of being swallowed by a person. The heating characteristics of the PU gel and SMA wire were experimentally investigated to identify the optimal structure of the actuator. The bending and torsion angles generated in the actuator were over 30° after approximately 3 min of ultrasonic heating (power: 20 W).

研制了一种能够改变人体内部医疗装置方向的软致动器。本研究中的致动器由形状记忆合金（SMA）导线连接到短圆柱形聚氨酯（PU）凝胶组成。通过超声波远程加热SMA导线。SMA钢丝引起PU凝胶的弯曲和扭转变形。通过在驱动器上安装一个医疗设备，可以改变设备的方向和姿势。PU凝胶长20 mm，直径9 mm。热量从PU凝胶传递到SMA丝（线圈，直径0.56 mm），导致SMA丝收缩和膨胀（双向变形）。这个系统使得执行器非常紧凑，甚至可以被一个人吞下。通过实验研究了PU凝胶和SMA丝的加热特性，确定了驱动器的最佳结构。超声加热约3 min（功率为20 W）后，致动器产生的弯曲和扭转角均大于30°。

引用次数: 0

High-reliability backside absolute piezoresistive pressure sensors for automotive applications 汽车用高可靠性后置绝对压阻式压力传感器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-16 Epub Date: 2026-02-06 DOI: 10.1016/j.sna.2026.117573

Bin Song , Fanliang Li , Dengfeng Wu , Jun Yang , Xiaoping Wang , Fulong Zhu , Sheng Liu

An air-conditioning pressure sensor is a critical component in the refrigeration system in vehicles. Because of the high pressure within the vehicle environment, the classic front-side microelectromechanical systems (MEMS) piezoresistive pressure sensors typically employ oil-filled isolation packaging, which requires multiple steps to achieve environmental isolation and pressure transmission but impairs the sensor performance and reliability. In this study, a backside absolute piezoresistive pressure sensor was conceived and fabricated using double-sided low-temperature wafer direct bonding to simplify the packaging structure and improve the overall reliability. The effects of the dimensions and positioning of the piezoresistors on sensitivity and nonlinearity were evaluated to increase sensitivity and stability. Packaging stress induced by the die-attach process was modeled to predict the impact of residual stress in epoxy resin on pressure sensor performance. The designed pressure sensor operates over 0–3.5 MPa, with a sensitivity of 4.78 mV/V/MPa and a nonlinearity of 0.1 % full-scale output (FSO). The long-term stability of the pressure sensor improved from 1.1 %FSO to 0.1 %FSO when the anodic bonding technique was applied to isolate thermal stress.

空调压力传感器是车辆制冷系统的关键部件。由于车辆环境中的高压，传统的前端微机电系统（MEMS）压阻式压力传感器通常采用充油隔离封装，这需要多个步骤来实现环境隔离和压力传递，但会损害传感器的性能和可靠性。为了简化封装结构，提高整体可靠性，本研究采用双面低温晶圆直接键合的方法，设计并制作了背面绝对压阻式压力传感器。评估了压敏电阻的尺寸和位置对灵敏度和非线性的影响，以提高灵敏度和稳定性。为了预测环氧树脂中残余应力对压力传感器性能的影响，建立了模贴过程引起的封装应力模型。设计的压力传感器工作范围为0-3.5 MPa，灵敏度为4.78 mV/V/MPa，非线性为0.1 %满量程输出（FSO）。采用阳极键合技术隔离热应力后，压力传感器的长期稳定性从1.1 %FSO提高到0.1 %FSO。

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引用次数: 0

Silver-nanowire-enhanced conductive hydrogels with high toughness and super sensitivity for character-recognizable writing screens and human motion monitoring 具有高韧性和超灵敏度的银纳米线增强导电水凝胶，用于字符可识别的书写屏幕和人体运动监测

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-16 Epub Date: 2026-02-12 DOI: 10.1016/j.sna.2026.117581

Jing-sheng Xia , Yuan-zhi Wang , Hong-ye Sun , Mitra Rahul , Ye Zhang , Chen Yao

Flexible hydrogels have garnered extensive research interest due to the synergy of toughness, rapid response and strain sensitivity. However, their applications have been largely confined to conventional strain sensing for human motion monitoring, leaving broader interactive functionalities underexplored. Herein, flexible sensing material based on a nanocomposite (NC) hydrogel synthesized via a one-pot polymerization of nano-clay (Laponite XLS) and N-isopropylacrylamide (NIPAM). The incorporation of silver nanowires (AgNWs) as conductive additives leads to a significant enhancement in the hydrogel’s electrical conductivity. The optimized NC‑AgNWs hydrogel exhibits remarkable synergistic properties: a tensile strength of 12.95 MPa paired with an ultrahigh elongation at break of 1977 %, a compressive strength of 86.38 kPa at 80 % strain, and an electrical conductivity of ∼2.42 mS·cm⁻¹ . The material also demonstrates excellent cyclic durability and millisecond-scale response times (350 ms and 80 ms under 10 % tensile and 2 % compressive loading, respectively). Capitalizing on its strain-sensitive resistive behavior, we further engineered a flexible writing screen that converts machine-written characters into distinguishable resistance waveforms. Additionally, the hydrogel serves as a highly responsive strain sensor for monitoring human movements. This work not only advances the design of multifunctional conductive hydrogels but also highlights their potential as a dynamic human-computer interface to address growing information security challenges.

柔性水凝胶由于其韧性、快速反应和应变敏感性的协同作用而获得了广泛的研究兴趣。然而，它们的应用主要局限于用于人体运动监测的传统应变传感，而更广泛的交互功能尚未得到充分开发。本文采用纳米粘土（Laponite XLS）和n -异丙基丙烯酰胺（NIPAM）一锅聚合法制备了基于纳米复合材料（NC）水凝胶的柔性传感材料。加入银纳米线（AgNWs）作为导电添加剂，可以显著提高水凝胶的导电性。优化后的NC - AgNWs水凝胶具有显著的协同特性：抗拉强度为12.95 MPa，断裂伸长率为1977 %，抗压强度为86.38 kPa，应变为80 %，电导率为~ 2.42 mS·cm⁻¹ 。该材料还表现出优异的循环耐久性和毫秒级响应时间（在10 %拉伸和2 %压缩载荷下分别为350 ms和80 ms）。利用其应变敏感的电阻特性，我们进一步设计了一种柔性书写屏幕，可以将机器书写的字符转换为可识别的电阻波形。此外，水凝胶作为一种高响应应变传感器，用于监测人体运动。这项工作不仅推进了多功能导电水凝胶的设计，而且突出了它们作为动态人机界面的潜力，以应对日益增长的信息安全挑战。

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引用次数: 0

Localized electrochemical deposition manufacturing of microcantilevers with various tilt angles and simulation analysis 不同倾角微悬臂梁的局部电化学沉积制造及仿真分析

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-16 Epub Date: 2026-02-10 DOI: 10.1016/j.sna.2026.117565

Dengguo Xu, Chuntao Meng, Ting Zhu, Qixin Qing

This study proposes a manufacturing method for microcantilevers using localized electrochemical deposition (LECD). LECD enables high-precision fabrication of microstructures through high-resolution, non-thermal processing. Microcantilevers with various tilt angles were deposited via LECD employing a microanode with a diameter of 20 μm. The diameter of the microcantilever initially decreases and subsequently increases with an increase in the tilt angle. The microcantilever deposited at a 45° tilt angle exhibits a minimum diameter of merely 6.7 μm. Simulations conducted with COMSOL software revealed that the tilt angle influenced the microcantilever diameter by altering the asymmetric distribution of the electric field and current density. Since current density is directly proportional to the electric field intensity, the short-circuit contact position at different voltages can be determined by analyzing the variations in current density offset. The fabrication of X-shaped and inverted h-shaped microstructures, composed of microcantilevers, was achieved using this manufacturing method. The tilt angle control electric field mode provides a method for LECD to modulate the distribution and intensity of the electric field, thereby enabling a reduction in the diameter of the microstructure. This research is highly significant for microscale three-dimensional manufacturing using LECD technology and holds great potential for future applications in microprobe detection, microelectromechanical systems (MEMS), and related fields.

本研究提出了一种利用局部电化学沉积（LECD）制造微悬臂梁的方法。led通过高分辨率、非热加工实现微结构的高精度制造。采用直径为20 μm的微阳极，通过led沉积不同倾角的微悬臂梁。微悬臂梁的直径随着倾角的增大先减小后增大。当微悬臂梁倾角为45°时，其最小直径仅为6.7 μm。利用COMSOL软件进行的模拟表明，倾斜角度通过改变电场和电流密度的不对称分布来影响微悬臂梁直径。由于电流密度与电场强度成正比，因此可以通过分析电流密度偏移量的变化来确定不同电压下的短路触点位置。利用这种制造方法，实现了由微悬臂组成的x形和倒h形微结构的制造。倾斜角度控制电场模式为led提供了一种调节电场分布和强度的方法，从而能够减小微结构的直径。该研究对利用led技术进行微尺度三维制造具有重要意义，在微探针检测、微机电系统（MEMS）等相关领域具有巨大的应用潜力。

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引用次数: 0

Lissajous multi-modal endomicroscopy with optical coherence tomography and confocal fluorescence microscopy Lissajous多模态内窥镜与光学相干断层扫描和共聚焦荧光显微镜

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-16 Epub Date: 2026-02-11 DOI: 10.1016/j.sna.2026.117547

Myung Ho Lee, Jintaek Im, Gichan Cho, Yeonhee Chang, Cheol Song

We present a multi-modal endomicroscopic system integrating confocal fluorescence microscopy (CFM) and optical coherence tomography (OCT) into a compact, resonant fiber scanner. The probe employs an asymmetric double D-shaped fiber cantilever to achieve axis-dependent frequency separation, enabling Lissajous scanning. An analytical model was formulated to predict tip displacement by combining geometric amplification, quality factor enhancement, and frequency-dependent transfer functions. This model captured axis-specific dynamics and guided cantilever-holder optimization via simulation. The probe achieved lateral and axial resolutions of 2.19 µm and 23.66 µm in CFM mode, and 24.77 µm and 6.98 µm in OCT mode. Ex vivo fluorescein-stained porcine stomach imaging confirmed simultaneous acquisition of en-face fluorescence and depth-resolved OCT images. These results validate the system’s ability to deliver complementary contrast and spatially correlated structural information in a compact platform. This multi-modal approach promises real-time surgical guidance and label-assisted diagnostics in clinical settings.

我们提出了一个多模态内窥镜系统集成共聚焦荧光显微镜（CFM）和光学相干断层扫描（OCT）到一个紧凑的，共振光纤扫描仪。探头采用非对称双d形光纤悬臂，实现轴向频率分离，实现Lissajous扫描。结合几何放大、质量因子增强和频率相关传递函数，建立了预测尖端位移的解析模型。该模型捕获了特定轴的动力学，并通过仿真指导悬臂支架优化。该探头在CFM模式下的横向和轴向分辨率分别为2.19µm和23.66µm，在OCT模式下分别为24.77µm和6.98µm。离体荧光染色猪胃成像证实同时获得正面荧光和深度分辨OCT图像。这些结果验证了系统在紧凑平台上提供互补对比和空间相关结构信息的能力。这种多模式的方法承诺实时手术指导和标签辅助诊断在临床设置。

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引用次数: 0