{"title":"Deformable mirror driven by piezoelectric thin film based on multi-electrode array","authors":"","doi":"10.1016/j.sna.2024.115876","DOIUrl":null,"url":null,"abstract":"<div><p>This paper designs and fabricates a MEMS deformable mirror with 61 electrodes driven by piezoelectric thin films (PZT) to achieve high voltage. This approach effectively corrects wavefront aberrations. Initially, the structural design and MEMS process scheme for the proposed deformable mirror are determined. Numerical simulations of electrode effects are conducted, and the working voltage and motion performance of the reflective mirror are tested using a digital interferometer. Experimental measurements of the surface deformation displacement of deformable mirrors with different electrodes are performed. A comparison of the simulation and experimental results indicates small coupling effects among the designed deformable mirror electrodes. The applied voltage and displacement response exhibit good linearity. Finally, based on the Zernike matrix model, the mirror surface shape is controlled, and Zernike polynomials of orders 2–4 are fitted. The results demonstrate that the deformable mirror has a high correction efficiency for low-order aberrations. Therefore, the proposed MEMS deformable mirror based on PZT piezoelectric thin films exhibits excellent motion and optical correction capabilities.</p></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":null,"pages":null},"PeriodicalIF":4.1000,"publicationDate":"2024-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424724008707","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
This paper designs and fabricates a MEMS deformable mirror with 61 electrodes driven by piezoelectric thin films (PZT) to achieve high voltage. This approach effectively corrects wavefront aberrations. Initially, the structural design and MEMS process scheme for the proposed deformable mirror are determined. Numerical simulations of electrode effects are conducted, and the working voltage and motion performance of the reflective mirror are tested using a digital interferometer. Experimental measurements of the surface deformation displacement of deformable mirrors with different electrodes are performed. A comparison of the simulation and experimental results indicates small coupling effects among the designed deformable mirror electrodes. The applied voltage and displacement response exhibit good linearity. Finally, based on the Zernike matrix model, the mirror surface shape is controlled, and Zernike polynomials of orders 2–4 are fitted. The results demonstrate that the deformable mirror has a high correction efficiency for low-order aberrations. Therefore, the proposed MEMS deformable mirror based on PZT piezoelectric thin films exhibits excellent motion and optical correction capabilities.
期刊介绍:
Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas:
• Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results.
• Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon.
• Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays.
• Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers.
Etc...