Optimizing SEM parameters for segmentation with AI – Part 1: Generating a training set

Abstract

Extracting significant quantitative results from SEM images requires feature segmentation with image processing software. The efficiency of segmentation algorithms depends on the image quality, determined by the parameters set on the microscope during acquisitions. By integrating AI within SEM acquisition workflows, it is possible to suggest microscope parameters that will produce images where the features to quantify will be easily segmented. Specifically, a model is trained to automatically suggest the beam energy and probe current to set on the microscope during acquisitions. This paper is the first of two parts, describing workflows for generating a complete training set. The training set is carefully designed, consisting of both simulated data and real data acquired on the SEM by varying the energy and current. Separate workflows are required for generating simulated and acquired training examples. Simulated data generation is accomplished with the MC X-ray simulator in Dragonfly, where multiple virtual samples are created to intentionally diversify the training set. Acquiring data on the SEM for training is a time-consuming process when compared to generating simulations and would ideally be avoided but is included here to determine the degree to which it is required. Using only simulated data for adequate training, we show that our data generation workflow can be fully automated and produces a considerable amount of high quality data rapidly and with minimal effort.