Research progress of quantum dot photolithography patterning and direct photolithography application

IF 9.5 2区 材料科学 Q1 CHEMISTRY, PHYSICAL Nano Research Pub Date : 2024-08-24 DOI:10.1007/s12274-024-6896-7
Zhong Chen, Yu Li, Zhongwei Man, Aiwei Tang
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Abstract

For the new display technology based on quantum dots (QDs), realizing high-precision arrays of red, green, and blue (RGB) pixels has been a significant research focus at present, aimed at achieving high-quality and high-resolution image displays. However, challenges such as material stability and the variability of process environments complicate the assurance of quality in high-precision patterns. The novel optical patterning technology, exemplified by direct photolithography, is considered a highly promising approach for achieving submicron-level, hyperfine patterning. On the technological level, this method produces patterned quantum dot light-emitting films through a photochemical reaction. Here, we provide a comprehensive review of various methods of QD photolithography patterning, including traditional photolithography, lift off, and direct photolithography, which mainly focused on direct photolithography. This review covers the classification of direct photolithography technologies, summarizes the latest research progress, and discusses future perspectives on the advancement of photolithography technology de-masking.

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量子点光刻图案化和直接光刻应用的研究进展
对于基于量子点(QDs)的新型显示技术而言,实现高精度的红、绿、蓝(RGB)像素阵列一直是当前的研究重点,其目的是实现高质量和高分辨率的图像显示。然而,材料的稳定性和加工环境的多变性等挑战使高精度图案的质量保证变得更加复杂。以直接光刻技术为代表的新型光学图案技术被认为是实现亚微米级超精细图案的一种极具前景的方法。在技术层面上,这种方法通过光化学反应生成图案化量子点发光薄膜。在此,我们对量子点光刻图案化的各种方法进行了全面综述,包括传统光刻法、升华法和直接光刻法,其中主要侧重于直接光刻法。本综述涵盖了直接光刻技术的分类,总结了最新的研究进展,并探讨了光刻技术去掩膜化的未来发展前景。
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来源期刊
Nano Research
Nano Research 化学-材料科学:综合
CiteScore
14.30
自引率
11.10%
发文量
2574
审稿时长
1.7 months
期刊介绍: Nano Research is a peer-reviewed, international and interdisciplinary research journal that focuses on all aspects of nanoscience and nanotechnology. It solicits submissions in various topical areas, from basic aspects of nanoscale materials to practical applications. The journal publishes articles on synthesis, characterization, and manipulation of nanomaterials; nanoscale physics, electrical transport, and quantum physics; scanning probe microscopy and spectroscopy; nanofluidics; nanosensors; nanoelectronics and molecular electronics; nano-optics, nano-optoelectronics, and nano-photonics; nanomagnetics; nanobiotechnology and nanomedicine; and nanoscale modeling and simulations. Nano Research offers readers a combination of authoritative and comprehensive Reviews, original cutting-edge research in Communication and Full Paper formats. The journal also prioritizes rapid review to ensure prompt publication.
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