Selective actuation of higher-order modes of an electromagnetically driven micro drum

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Sensors and Actuators A-physical Pub Date : 2024-09-11 DOI:10.1016/j.sna.2024.115867

Lvjun Wang , Wen Zhao , Mohammad Younis

引用次数: 0

Abstract

In this paper, we experimentally investigate selective actuation of the first few higher-order modes of a micromachined silicon nitride circular membrane (micro drum), which is actuated by electromagnetic forces. A novel design of electrodes is proposed to enable selective actuation for portions of the membrane with the Lorentz force, which excites efficiently the higher-order modes. With different electrode configurations, we show that the (0, 1) mode, the degenerate (1, 1) modes, and the (2, 1) mode can be selectively activated or deactivated using the orthogonality between the actuation force and the mode shapes. A reduced-order model for the circular membrane is established and used to explain the results.

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

选择性驱动电磁驱动微型鼓的高阶模式

在本文中，我们通过实验研究了利用电磁力驱动的微机械氮化硅圆膜（微鼓）的前几个高阶模的选择性致动。我们提出了一种新颖的电极设计，利用洛伦兹力对膜的某些部分进行选择性致动，从而有效激发高阶模态。通过不同的电极配置，我们展示了利用致动力和模式形状之间的正交性，可以选择性地激活或停用（0，1）模式、退化（1，1）模式和（2，1）模式。建立了圆膜的降阶模型并用于解释结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文去求助

来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...