Optimization of Post-Annealing Temperature of RF Magnetron-Sputtered ZnO Thin Films for Enhancing Performances of UV Photodetectors

IF 3.1 4区 工程技术 Q2 ELECTROCHEMISTRY Journal of The Electrochemical Society Pub Date : 2024-09-17 DOI:10.1149/1945-7111/ad7983
Xueyuan Wei, Yao Liu and Lesi Wei
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Abstract

In this study, we examined the surface morphology and crystal structure of RF-sputtered ZnO thin films that were annealed at various temperatures. Also, we fabricated UV photodetectors with an Au-ZnO-ITO sandwich structure, utilizing the thin films annealed at 600 °C. The surface roughness of the film initially increases and then decreases as the annealing temperature rises, and the crystalline quality improves with an increase in the annealing temperature. Due to the Schottky heterojunction formed by the Au-semi contact, the fabricated UV photodetector exhibits a responsivity of 7.91 mA W−1 under 405 nm UV light. And the device demonstrates high response stability and rapid response sensitivity, with a swift rise time of 80 ms at a light intensity of 2.56 mW cm−2.
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优化射频磁控溅射氧化锌薄膜的退火后温度以提高紫外线光电探测器的性能
在这项研究中,我们考察了在不同温度下退火的射频溅射氧化锌薄膜的表面形貌和晶体结构。此外,我们还利用在 600 °C 下退火的薄膜制造了具有金-氧化锌-氧化钛夹层结构的紫外光检测器。随着退火温度的升高,薄膜的表面粗糙度先增大后减小,晶体质量也随着退火温度的升高而提高。由于金-半接触形成了肖特基异质结,因此所制备的紫外光探测器在 405 纳米紫外光下的响应率为 7.91 mA W-1。该器件具有高响应稳定性和快速响应灵敏度,在光强为 2.56 mW cm-2 时,快速上升时间为 80 ms。
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来源期刊
CiteScore
7.20
自引率
12.80%
发文量
1369
审稿时长
1.5 months
期刊介绍: The Journal of The Electrochemical Society (JES) is the leader in the field of solid-state and electrochemical science and technology. This peer-reviewed journal publishes an average of 450 pages of 70 articles each month. Articles are posted online, with a monthly paper edition following electronic publication. The ECS membership benefits package includes access to the electronic edition of this journal.
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