Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator.

IF 7.3 1区工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-10-11 DOI:10.1038/s41378-024-00790-6

Xiyu Gu, Yan Liu, Yuanhang Qu, Xiang Chen, Zesheng Liu, Yao Cai, Wenjuan Liu, Shishang Guo, Chengliang Sun

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Abstract

The high-frequency and high-quality factor characteristics of bulk acoustic wave (BAW) resonators have significantly advanced their application in sensing technologies. In this work, a fluidic sensor based on a BAW resonator structure is fabricated and investigated. Embedded microchannels are formed beneath the active area of the BAW device without the need for external processes. As liquid flows through the microchannel, pressure is exerted on the upper wall (piezoelectric film) of the microchannel, which causes a shift in the resonant frequency. Using density functional theory, we revealed the intrinsic mechanism by which piezoelectric film deformation influences BAW resonator performance. Theoretically, the upwardly convex piezoelectric film caused by liquid flow can increase the resonant frequency. The experimental results obtained with ethanol solutions of different concentrations reveal that the sensor, which operates at a high resonant frequency of 2.225 GHz, achieves a remarkable sensitivity of 5.1 MHz/% (221 ppm/%), with an ultrahigh linearity of 0.995. This study reveals the intrinsic mechanism of liquid sensing based on BAW resonators, highlights the potential of AlN/Al_0.8Sc_0.2N composite film BAW resonators in liquid sensing applications and offers insights for future research and development in this field.

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基于嵌入式微通道体声波谐振器的超灵敏液体传感器。

体声波（BAW）谐振器的高频和高质量因子特性极大地推动了其在传感技术中的应用。在这项工作中，我们制作并研究了一种基于 BAW 谐振器结构的流体传感器。无需外部工艺，即可在 BAW 器件的有源区域下方形成嵌入式微通道。当液体流经微通道时，压力会施加到微通道的上壁（压电薄膜）上，从而导致谐振频率发生偏移。利用密度泛函理论，我们揭示了压电薄膜形变影响 BAW 谐振器性能的内在机制。从理论上讲，液体流动导致压电薄膜向上凸起可以提高谐振频率。利用不同浓度的乙醇溶液获得的实验结果表明，该传感器在 2.225 GHz 的高谐振频率下工作，灵敏度高达 5.1 MHz/%（221 ppm/%），线性度高达 0.995。这项研究揭示了基于声表面波谐振器的液体传感的内在机理，凸显了 AlN/Al0.8Sc0.2N 复合薄膜声表面波谐振器在液体传感应用中的潜力，并为该领域未来的研究和开发提供了启示。

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来源期刊

Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)

CiteScore

12.00

自引率

3.80%

发文量

123

审稿时长

20 weeks

期刊介绍： Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.