Effect of Surface Roughness on Range Straggling at Low Energy Ions Bombardment

Abstract

The primary ions strike the target in randomly distributed points of its surface, potentially leading to the creation of surface roughness. The first involves exploring the variation in density near surface target which is challenging to measure. The second focuses on observing alterations in the surface topography of the target by measuring the amount of deformation in the geometric structure. This brief work is clearly needed to clarify the first approach by adopting the feasible expressions to establish the dependence of the range straggling, energy and dose of ions beam on the basic mechanisms leading to surface roughness by introducing new parameter described the unchanged surface density rate. This parameter predicts the frequency of presence roughness phenomena. The results of our simulations performed for an amorphous target are in perfect agreement with experimental results obtained by Wach et al.