Y. Ishii , R. Yamagata , T. Satoh , S. Matsuyama , T. Kamiya , S. Onoda
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引用次数: 0
Abstract
This paper presents a comprehensive study on the enhancements made to the heavy-ion microbeam (H-MB) and light-ion microbeam (L-MB) systems at the Takasaki Institute for Advanced Quantum Science, part of the National Institutes for Quantum Science and Technology (QST), and their implications for future research in ion microbeam technology. Our work addresses the critical need for submicron beam sizes in advanced ion microbeam applications, a challenge previously unmet due to limitations in the original system designs and aging components. The manuscript details the extensive upgrades undertaken for both the H-MB and L-MB systems, including the implementation of new quadruple magnets, refined demagnification strategies, and advanced control systems, culminating in the successful formation of submicron ion beams. The meticulous alignment procedures for both the H-MB and L-MB have enabled precise ion beam focusing. The current beam sizes have been measured at 1.0 × 1.1 µm2 with a beam current of approximately 10 pA for the H-MB, and 500 × 600 nm2 with a beam current of approximately 50 pA for the L-MB at a 3 MeV H+ beam.
期刊介绍:
Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.