Fei Xie , Lili Liang , Qingbin Zhou , Ziwei Feng , Jian Xu , Xiangping Li , Yaoyu Cao
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引用次数: 0
Abstract
A novel composite photoresist, derived from acrylates and carboxylic-functionalized multi-walled carbon nanotubes (MWNTs-COOH), has been developed for the fabrication of sub-diffraction-sized polymer nanowires using STED-inspired lithography. The MWNTs-COOH dispersed in highly cross-linking acrylate monomers benefits to a reduced inhibition laser power for improving lithography. With the MWNTs-COOH, the inhibition laser power is decreased from 5 mW to 3 mW, while the achievable minimum feature size is increased from 121 nm to 48 nm. This innovative approach holds significant promise for the development of sub-diffraction MWCNTs/polymer composite-based devices in the fields of Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS).
期刊介绍：
Optik publishes articles on all subjects related to light and electron optics and offers a survey on the state of research and technical development within the following fields:
Optics:
-Optics design, geometrical and beam optics, wave optics-
Optical and micro-optical components, diffractive optics, devices and systems-
Photoelectric and optoelectronic devices-
Optical properties of materials, nonlinear optics, wave propagation and transmission in homogeneous and inhomogeneous materials-
Information optics, image formation and processing, holographic techniques, microscopes and spectrometer techniques, and image analysis-
Optical testing and measuring techniques-
Optical communication and computing-
Physiological optics-
As well as other related topics.
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