Fabrication of optimized partial-reflection coatings for mid-infrared quantum cascade lasers

IF 2 3区物理与天体物理 Q3 OPTICS Applied Physics B Pub Date : 2024-10-14 DOI:10.1007/s00340-024-08329-3

Dominika Niewczas, Dorota Pierścińska, Grzegorz Sobczak, Paweł Kozłowski, Agata Krząstek, Tomasz Stefaniuk, Kamil Pierściński

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Abstract

This study presents both numerical modeling and experimental fabrication of three different partial-reflection (PR) coatings each optimized for quantum cascade lasers (QCLs) that emit radiation in the mid-infrared range. A novel double-layer PR coating comprising silicon dioxide (SiO₂₎ and silicon nitride (Si₃N₄) was proposed as a potential solution for compatibility with QCLs fabrication processes. Subsequently, the PR coating was compared with two well-known PR coatings: a single layer of aluminum oxide (Al₂O₃) and a single layer of yttrium oxide (Y₂O₃). The coatings were designed to reduce the reflectivity of the front laser mirror from 30% to approximately 13%. The thickness of the dielectric layers was optimized for lasers emitting at 4.4 μm, with applicability in the 2.5–6 μm range. The proposed double-layer coating achieved the desired reflectivity while reducing the total coating thickness by 120 nm. By using the presented coatings it will be possible to increase the optical power of Mid-Infrared QCLs.

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为中红外量子级联激光器制作优化的偏反射涂层

本研究介绍了三种不同的部分反射（PR）涂层的数值建模和实验制造，每种涂层都针对发射中红外辐射的量子级联激光器（QCL）进行了优化。研究人员提出了一种由二氧化硅（SiO2）和氮化硅（Si3N4）组成的新型双层偏反射涂层，作为与量子级联激光器制造工艺兼容的潜在解决方案。随后，将这种 PR 涂层与两种著名的 PR 涂层（单层氧化铝 (Al2O3) 和单层氧化钇 (Y2O3)）进行了比较。这些涂层的设计目的是将前激光反射镜的反射率从 30% 降低到约 13%。电介质层的厚度针对 4.4 μm 波长的激光器进行了优化，适用于 2.5-6 μm 波长的激光器。提议的双层涂层达到了理想的反射率，同时将涂层总厚度减少了 120 nm。通过使用所提出的涂层，将有可能提高中红外 QCL 的光功率。

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来源期刊

Applied Physics B 物理-光学

CiteScore

4.00

自引率

4.80%

发文量

202

审稿时长

3.0 months

期刊介绍： Features publication of experimental and theoretical investigations in applied physics Offers invited reviews in addition to regular papers Coverage includes laser physics, linear and nonlinear optics, ultrafast phenomena, photonic devices, optical and laser materials, quantum optics, laser spectroscopy of atoms, molecules and clusters, and more 94% of authors who answered a survey reported that they would definitely publish or probably publish in the journal again Publishing essential research results in two of the most important areas of applied physics, both Applied Physics sections figure among the top most cited journals in this field. In addition to regular papers Applied Physics B: Lasers and Optics features invited reviews. Fields of topical interest are covered by feature issues. The journal also includes a rapid communication section for the speedy publication of important and particularly interesting results.