{"title":"A contactless method of emitter sheet resistance measurement for silicon wafers","authors":"Yan Zhu, Thorsten Trupke, Ziv Hameiri","doi":"10.1016/j.solmat.2024.113209","DOIUrl":null,"url":null,"abstract":"<div><div>The emitter sheet resistance is an essential parameter impacting the efficiency of silicon solar cells with diffused layers. Conventional measurement methods of this parameter either require electrical contacts or are impacted by the bulk resistivity of the measured samples. In this study, a novel method based on the combination of eddy-current conductance and photoluminescence imaging is developed for a contactless determination of the emitter sheet resistance. Numerical simulation is used to establish the correlation between the photoluminescence profile and the sum of the emitter and bulk resistance. Together with eddy-current conductance measurements, the emitter sheet resistance and bulk resistance can be separated. The accuracy of the method is validated experimentally, and its uncertainty is investigated. The contactless nature of the developed method makes it attractive for inline inspection of diffused layers in solar cell manufacturing.</div></div>","PeriodicalId":429,"journal":{"name":"Solar Energy Materials and Solar Cells","volume":"278 ","pages":"Article 113209"},"PeriodicalIF":6.3000,"publicationDate":"2024-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Solar Energy Materials and Solar Cells","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S092702482400521X","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENERGY & FUELS","Score":null,"Total":0}
引用次数: 0
Abstract
The emitter sheet resistance is an essential parameter impacting the efficiency of silicon solar cells with diffused layers. Conventional measurement methods of this parameter either require electrical contacts or are impacted by the bulk resistivity of the measured samples. In this study, a novel method based on the combination of eddy-current conductance and photoluminescence imaging is developed for a contactless determination of the emitter sheet resistance. Numerical simulation is used to establish the correlation between the photoluminescence profile and the sum of the emitter and bulk resistance. Together with eddy-current conductance measurements, the emitter sheet resistance and bulk resistance can be separated. The accuracy of the method is validated experimentally, and its uncertainty is investigated. The contactless nature of the developed method makes it attractive for inline inspection of diffused layers in solar cell manufacturing.
期刊介绍：
Solar Energy Materials & Solar Cells is intended as a vehicle for the dissemination of research results on materials science and technology related to photovoltaic, photothermal and photoelectrochemical solar energy conversion. Materials science is taken in the broadest possible sense and encompasses physics, chemistry, optics, materials fabrication and analysis for all types of materials.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
