Low-temperature fabrication of high-performance AZO/Ag/WO3 multilayer films for flexible heaters

IF 2.5 4区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Applied Physics A Pub Date : 2024-10-22 DOI:10.1007/s00339-024-07993-8

Ke Zhu, Kaiwei Yang

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Abstract

In this study, Al-doped ZnO/Ag/WO₃ (AZO/Ag/WO₃)multilayer films were fabricated on polyethylene terephthalate (PET) substrates using the magnetron sputtering technique. A two-step magnetron sputtering process was employed to deposit WO₃, effectively preventing insulation in the AZO/Ag/WO₃ multilayer film caused by silver oxidation. The optical properties of the AZO/Ag/WO₃ multilayer films can be adjusted by varying the thickness of AZO and WO₃ layers. The optimal AZO/Ag/WO₃ multilayer film demonstrates a maximum figure-of-merit of 1.74 × 10^− 2 Ω⁻¹, with an average visible light transmittance of 81.1% and a sheet resistance of 7.04 Ω sq^− 1. When applied in transparent flexible heaters, the AZO/Ag/WO₃ multilayer films exhibit rapid thermal response, stable and controllable heating performance at low operating voltage, indicating exceptional thermal properties and high conductivity. The two-step magnetron sputtering deposition of external oxide layers to prevent the oxidation of silver is cost-effective and can be utilized to create high-performance oxide/metal/oxide transparent electrodes.

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低温制备用于柔性加热器的高性能 AZO/Ag/WO3 多层薄膜

本研究利用磁控溅射技术在聚对苯二甲酸乙二醇酯（PET）基底上制造了铝掺杂 ZnO/Ag/WO3（AZO/Ag/WO3）多层膜。采用两步磁控溅射工艺沉积 WO3，有效地防止了银氧化导致的 AZO/Ag/WO3 多层膜绝缘。AZO/Ag/WO3 多层薄膜的光学特性可通过改变 AZO 层和 WO3 层的厚度来调节。最佳的 AZO/Ag/WO3 多层薄膜的最大功率为 1.74 × 10- 2 Ω-1，平均可见光透射率为 81.1%，薄片电阻为 7.04 Ω sq-1。当应用于透明柔性加热器时，AZO/Ag/WO3 多层薄膜表现出快速的热响应，在低工作电压下具有稳定、可控的加热性能，显示出卓越的热性能和高导电性。通过两步磁控溅射沉积外部氧化层以防止银氧化的方法具有成本效益，可用于制造高性能的氧化物/金属/氧化物透明电极。

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来源期刊

Applied Physics A 工程技术-材料科学：综合

CiteScore

4.80

自引率

7.40%

发文量

964

审稿时长

38 days

期刊介绍： Applied Physics A publishes experimental and theoretical investigations in applied physics as regular articles, rapid communications, and invited papers. The distinguished 30-member Board of Editors reflects the interdisciplinary approach of the journal and ensures the highest quality of peer review.