Soft electronic vias and interconnects through rapid three-dimensional assembly of liquid metal microdroplets

IF 33.7 1区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Nature Electronics Pub Date : 2024-10-24 DOI:10.1038/s41928-024-01268-z

Dong Hae Ho, Chenhao Hu, Ling Li, Michael D. Bartlett

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Abstract

The development of soft electronics requires methods to connect flexible and stretchable circuits. With conventional rigid electronics, vias are typically used to electrically connect circuits with multilayered architectures, increasing device integration and functionality. However, creating vias using soft conductors leads to additional challenges. Here we show that soft vias and planar interconnects can be created through the directed stratification of liquid metal droplets with programmed photocuring. Abnormalities that occur at the edges of a mask during ultraviolet exposure are leveraged to create vertical stair-like architectures of liquid metal droplets within the photoresin. The liquid metal droplets in the uncured (liquid) resin rapidly settle, assemble and then are fully cured, forming electrically conductive soft vias at multiple locations throughout the circuit in a parallel and spatially tunable manner. Our three-dimensional selective stratification method can also form seamless connections with planar interconnects, for in-plane and through-plane electrical integration.

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通过液态金属微滴的快速三维组装实现软电子通孔和互连

软电子器件的开发需要采用连接柔性和可拉伸电路的方法。在传统的刚性电子器件中，通孔通常用于多层结构电路的电气连接，从而提高器件的集成度和功能性。然而，使用软导体创建通孔会带来额外的挑战。在这里，我们展示了利用程序光固化技术对液态金属液滴进行定向分层，从而创建软通孔和平面互连。利用紫外线曝光时掩膜边缘出现的异常，可以在光刻胶中形成垂直的阶梯状液态金属液滴结构。未固化（液态）树脂中的液态金属液滴迅速沉淀、组装，然后完全固化，以平行和空间可调的方式在整个电路的多个位置形成导电软孔。我们的三维选择性分层方法还能与平面互连器件形成无缝连接，实现面内和面内电气集成。

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来源期刊

Nature Electronics Engineering-Electrical and Electronic Engineering

CiteScore

47.50

自引率

2.30%

发文量

159

期刊介绍： Nature Electronics is a comprehensive journal that publishes both fundamental and applied research in the field of electronics. It encompasses a wide range of topics, including the study of new phenomena and devices, the design and construction of electronic circuits, and the practical applications of electronics. In addition, the journal explores the commercial and industrial aspects of electronics research. The primary focus of Nature Electronics is on the development of technology and its potential impact on society. The journal incorporates the contributions of scientists, engineers, and industry professionals, offering a platform for their research findings. Moreover, Nature Electronics provides insightful commentary, thorough reviews, and analysis of the key issues that shape the field, as well as the technologies that are reshaping society. Like all journals within the prestigious Nature brand, Nature Electronics upholds the highest standards of quality. It maintains a dedicated team of professional editors and follows a fair and rigorous peer-review process. The journal also ensures impeccable copy-editing and production, enabling swift publication. Additionally, Nature Electronics prides itself on its editorial independence, ensuring unbiased and impartial reporting. In summary, Nature Electronics is a leading journal that publishes cutting-edge research in electronics. With its multidisciplinary approach and commitment to excellence, the journal serves as a valuable resource for scientists, engineers, and industry professionals seeking to stay at the forefront of advancements in the field.