Bartosz Pruchnik, Krzysztof Kwoka, Ewelina Gacka, Dominik Badura, Piotr Kunicki, Andrzej Sierakowski, Paweł Janus, Tomasz Piasecki, Teodor Gotszalk
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引用次数: 0
Abstract
Focused electron beam-induced deposition (FEBID) is a novel technique for the development of multimaterial nanostructures. More importantly, it is applicable to the fabrication of free-standing nanostructures. Experimenting at the nanoscale requires instruments with sufficient resolution and sensitivity to measure various properties of nanostructures. Such measurements (regardless of the nature of the quantities being measured) are particularly problematic in the case of free-standing nanostructures, whose properties must be separated from the measurement system to avoid possible interference. In this paper, we propose novel devices, namely operational micro-electromechanical system (opMEMS) bridges. These are 3D substrates with nanometer-scale actuation capability and equipped with electrical contacts characterised by leakage resistances above 100 GΩ, which provide a platform for comprehensive measurements of properties (i.e., resistance) of free-standing FEBID structures. We also present a use case scenario in which an opMEMS bridge is used to measure the resistance of a free-standing FEBID nanostructure.
期刊介绍:
The Beilstein Journal of Nanotechnology is an international, peer-reviewed, Open Access journal. It provides a unique platform for rapid publication without any charges (free for author and reader) – Platinum Open Access. The content is freely accessible 365 days a year to any user worldwide. Articles are available online immediately upon publication and are publicly archived in all major repositories. In addition, it provides a platform for publishing thematic issues (theme-based collections of articles) on topical issues in nanoscience and nanotechnology.
The journal is published and completely funded by the Beilstein-Institut, a non-profit foundation located in Frankfurt am Main, Germany. The editor-in-chief is Professor Thomas Schimmel – Karlsruhe Institute of Technology. He is supported by more than 20 associate editors who are responsible for a particular subject area within the scope of the journal.