New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures.

IF 2.6 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Beilstein Journal of Nanotechnology Pub Date : 2024-10-23 eCollection Date: 2024-01-01 DOI:10.3762/bjnano.15.103
Bartosz Pruchnik, Krzysztof Kwoka, Ewelina Gacka, Dominik Badura, Piotr Kunicki, Andrzej Sierakowski, Paweł Janus, Tomasz Piasecki, Teodor Gotszalk
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Abstract

Focused electron beam-induced deposition (FEBID) is a novel technique for the development of multimaterial nanostructures. More importantly, it is applicable to the fabrication of free-standing nanostructures. Experimenting at the nanoscale requires instruments with sufficient resolution and sensitivity to measure various properties of nanostructures. Such measurements (regardless of the nature of the quantities being measured) are particularly problematic in the case of free-standing nanostructures, whose properties must be separated from the measurement system to avoid possible interference. In this paper, we propose novel devices, namely operational micro-electromechanical system (opMEMS) bridges. These are 3D substrates with nanometer-scale actuation capability and equipped with electrical contacts characterised by leakage resistances above 100 GΩ, which provide a platform for comprehensive measurements of properties (i.e., resistance) of free-standing FEBID structures. We also present a use case scenario in which an opMEMS bridge is used to measure the resistance of a free-standing FEBID nanostructure.

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用于测量基于 FEBID 的纳米结构特性的新型可操作 MEMS 桥。
聚焦电子束诱导沉积(FEBID)是一种用于开发多材料纳米结构的新型技术。更重要的是,它适用于制造独立的纳米结构。纳米尺度的实验需要具有足够分辨率和灵敏度的仪器来测量纳米结构的各种特性。在独立纳米结构的情况下,这种测量(无论被测量的性质如何)尤其成问题,因为其特性必须与测量系统分离,以避免可能的干扰。在本文中,我们提出了一种新型装置,即操作微机电系统(opMEMS)桥。它们是具有纳米级致动能力的三维基底,配备了漏电电阻超过 100 GΩ 的电触点,为全面测量独立 FEBID 结构的特性(如电阻)提供了平台。我们还介绍了一个使用案例,其中使用了 opMEMS 电桥来测量独立 FEBID 纳米结构的电阻。
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来源期刊
Beilstein Journal of Nanotechnology
Beilstein Journal of Nanotechnology NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.70
自引率
3.20%
发文量
109
审稿时长
2 months
期刊介绍: The Beilstein Journal of Nanotechnology is an international, peer-reviewed, Open Access journal. It provides a unique platform for rapid publication without any charges (free for author and reader) – Platinum Open Access. The content is freely accessible 365 days a year to any user worldwide. Articles are available online immediately upon publication and are publicly archived in all major repositories. In addition, it provides a platform for publishing thematic issues (theme-based collections of articles) on topical issues in nanoscience and nanotechnology. The journal is published and completely funded by the Beilstein-Institut, a non-profit foundation located in Frankfurt am Main, Germany. The editor-in-chief is Professor Thomas Schimmel – Karlsruhe Institute of Technology. He is supported by more than 20 associate editors who are responsible for a particular subject area within the scope of the journal.
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