Graphene MEMS and NEMS.

IF 7.3 1区工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-10-28 DOI:10.1038/s41378-024-00791-5

Xuge Fan, Chang He, Jie Ding, Qiang Gao, Hongliang Ma, Max C Lemme, Wendong Zhang

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Abstract

Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength, and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS, and sensor applications.

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石墨烯 MEMS 和 NEMS。

石墨烯因其原子厚度、极高的载流子迁移率、高机械强度和压阻机电传导性能，正越来越多地被用作微机电系统和纳米机电系统（MEMS 和 NEMS）中一种有趣的换能器薄膜。基于石墨烯的 NEMS 器件具有更高的灵敏度、更小的尺寸和新的功能。在本综述中，我们将讨论石墨烯作为 MEMS 和 NEMS 功能材料的优点、石墨烯的相关特性、石墨烯 MEMS 和 NEMS 的传导机制、将石墨烯与 MEMS 基底集成的典型转移方法、制造悬浮石墨烯的方法以及石墨烯图案化和电接触。因此，我们概述了基于悬浮和非悬浮石墨烯结构的设备。最后，我们讨论了石墨烯在 MEMS 和 NEMS 中应用的潜力和挑战。由于其独特的特性，石墨烯在新兴的微机电系统、近机电系统和传感器应用中是一种前景广阔的材料。

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来源期刊

Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)

CiteScore

12.00

自引率

3.80%

发文量

123

审稿时长

20 weeks

期刊介绍： Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.