Protective Heterophase Coatings Produced by Electrospark Deposition and High-Power Impulse Magnetron Sputtering

E. I. Zamulaeva, A. E. Kudryashov, Ph. V. Kiryukhantsev-Korneev, E. A. Bashkirov, S. K. Mukanov, Yu. S. Pogozhev, E. A. Levashov
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Abstract

In order to increase the service life of critical products made of refractory metals, the most effective is the use of protective coatings based on oxidation-resistant ceramic materials. Using an electrode/target made of heterophase HfSi2–MoSi2–HfB2 ceramics by electrospark deposition (ESD), high-power impulse magnetron sputtering (HIPIMS) technologies, as well as the combined ESD + HIPIMS technology, coatings were deposited onto molybdenum substrate (MCh-1 brand). Electrode materials and coatings were studied by the X-ray diffraction, the glow discharge optical emission spectroscopy, the X-ray spectral microanalysis, and the scanning electron microscopy. Combined ESD + HIPIMS technology made it possible to create a hard layer of oxidation-resistant ceramics on the surface of the substrate, which does not produce through cracks inherent in ESD coatings.

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电火花沉积和大功率脉冲磁控溅射产生的保护性异相涂层
为了延长由难熔金属制成的关键产品的使用寿命,最有效的方法是使用基于抗氧化陶瓷材料的保护涂层。通过电火花沉积(ESD)、高功率脉冲磁控溅射(HIPIMS)以及 ESD + HIPIMS 组合技术,使用异相 HfSi2-MoSi2-HfB2 陶瓷制成的电极/靶材,在钼基板(MCh-1 牌)上沉积了涂层。通过 X 射线衍射、辉光放电光发射光谱、X 射线光谱显微分析和扫描电子显微镜对电极材料和涂层进行了研究。结合 ESD + HIPIMS 技术,可以在基底表面形成一层坚硬的抗氧化陶瓷层,不会产生 ESD 涂层固有的贯穿裂纹。
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来源期刊
Surface Engineering and Applied Electrochemistry
Surface Engineering and Applied Electrochemistry Engineering-Industrial and Manufacturing Engineering
CiteScore
1.60
自引率
22.20%
发文量
54
期刊介绍: Surface Engineering and Applied Electrochemistry is a journal that publishes original and review articles on theory and applications of electroerosion and electrochemical methods for the treatment of materials; physical and chemical methods for the preparation of macro-, micro-, and nanomaterials and their properties; electrical processes in engineering, chemistry, and methods for the processing of biological products and food; and application electromagnetic fields in biological systems.
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