{"title":"Surface science studies on electron-induced reactions of NH3 and their perspectives for enhancing nanofabrication processes","authors":"","doi":"10.1016/j.susc.2024.122628","DOIUrl":null,"url":null,"abstract":"<div><div>Ammonia (NH<sub>3</sub>) dissociates efficiently when it interacts with an electron beam. This applies not only to single electron-NH<sub>3</sub> collisions in the gas phase but also to electron irradiation of NH<sub>3</sub> adsorbed on surfaces. The dissociation products include atomic hydrogen which can act as a reducing agent or NH<sub>2</sub> radicals that can bind to suitable surfaces or to adsorbed molecules. This chemistry can be exploited in nanofabrication processes that use electron beams for deposition, etching, or modification of materials. This review describes the current state of insight regarding electron-induced reactions of NH<sub>3</sub> adsorbed on surfaces and outlines approaches to the use of these reactions for enhancing electron beam induced nanofabrication processes. First, an overview of surface science studies on electron-induced reactions of NH<sub>3</sub> adsorbed on single crystal surfaces is given. This is followed by a summary of studies on the use of NH<sub>3</sub> for improving the purity of deposits prepared by electron beam induced deposition (EBID) and on the prospects of NH<sub>3</sub> to suppress unwanted thermal surface chemistry during EBID. Finally, we discuss electron-induced reactions of NH<sub>3</sub> that are fundamental to the modification of carbonaceous nanomaterials as well as potential application scenarios such as the functionalization of self-assembled monolayers and humidity sensing.</div></div>","PeriodicalId":22100,"journal":{"name":"Surface Science","volume":null,"pages":null},"PeriodicalIF":2.1000,"publicationDate":"2024-10-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface Science","FirstCategoryId":"92","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0039602824001791","RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
引用次数: 0
Abstract
Ammonia (NH3) dissociates efficiently when it interacts with an electron beam. This applies not only to single electron-NH3 collisions in the gas phase but also to electron irradiation of NH3 adsorbed on surfaces. The dissociation products include atomic hydrogen which can act as a reducing agent or NH2 radicals that can bind to suitable surfaces or to adsorbed molecules. This chemistry can be exploited in nanofabrication processes that use electron beams for deposition, etching, or modification of materials. This review describes the current state of insight regarding electron-induced reactions of NH3 adsorbed on surfaces and outlines approaches to the use of these reactions for enhancing electron beam induced nanofabrication processes. First, an overview of surface science studies on electron-induced reactions of NH3 adsorbed on single crystal surfaces is given. This is followed by a summary of studies on the use of NH3 for improving the purity of deposits prepared by electron beam induced deposition (EBID) and on the prospects of NH3 to suppress unwanted thermal surface chemistry during EBID. Finally, we discuss electron-induced reactions of NH3 that are fundamental to the modification of carbonaceous nanomaterials as well as potential application scenarios such as the functionalization of self-assembled monolayers and humidity sensing.
期刊介绍:
Surface Science is devoted to elucidating the fundamental aspects of chemistry and physics occurring at a wide range of surfaces and interfaces and to disseminating this knowledge fast. The journal welcomes a broad spectrum of topics, including but not limited to:
• model systems (e.g. in Ultra High Vacuum) under well-controlled reactive conditions
• nanoscale science and engineering, including manipulation of matter at the atomic/molecular scale and assembly phenomena
• reactivity of surfaces as related to various applied areas including heterogeneous catalysis, chemistry at electrified interfaces, and semiconductors functionalization
• phenomena at interfaces relevant to energy storage and conversion, and fuels production and utilization
• surface reactivity for environmental protection and pollution remediation
• interactions at surfaces of soft matter, including polymers and biomaterials.
Both experimental and theoretical work, including modeling, is within the scope of the journal. Work published in Surface Science reaches a wide readership, from chemistry and physics to biology and materials science and engineering, providing an excellent forum for cross-fertilization of ideas and broad dissemination of scientific discoveries.