Theoretical investigation of multipulse femtosecond laser processing on silicon carbide: ablation, shielding effect, and recast formation

Abstract

In this study, we propose a transient multi-physics coupling model for ultrafast laser ablation based on the material point method (MPM). By employing the continuum assumption for material, heat transfer equation and particle phase change, as well as spatial discretization of the model, we achieve simulations of various coupled physical phenomena such as material temperature, phase change, stress, and recast layer formation. In terms of time, we simulate laser processing processes with up to 1000 pulses. The model is validated by comparing with experimental results on ablation morphology, recast layer formation from melted particles, and surface oxidation. The proposed model accurately captures the multi-physics aspects of ultrafast laser ablation processes in SiC ceramics. The experimental validation confirms the model’s reliability and offers valuable insights into the underlying physical phenomena.